Method of applying an antireflective and/or dielectric coating

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United States of America Patent

PATENT NO 4347263
SERIAL NO

06257250

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Abstract

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A method of applying an antireflective and/or dielectric coating for solar energy cells by directing from different sources (1) a vapor comprising a metal halide or metal alkoxide and (2) oxygen to the heated surface of a silicon wafer. The metal is deposited on the silicon in the form of an oxide.

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Patent Owner(s)

  • AMOCO/ENRON SOLAR

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Whitehouse, Daniel L Clarksburg, MD 4 31

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