Positive radiation sensitive resist terpolymers
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United States of America Patent
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Oct 19, 1982
Grant Date -
N/A
app pub date -
Mar 16, 1981
filing date -
Mar 16, 1981
priority date (Note) -
Expired
status (Latency Note)
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Abstract
This invention relates to novel terpolymers of 3-methylcyclopentene, an omega alkynoic acid and sulfur dioxide. Positive radiation sensitive films prepared from the subject terpolymers adhere well to the substrate, demonstrate resistance to cracking and erosion during development and possess excellent edge definition.
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