Thin film thickness monitor
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 26, 1982
Issued Date -
N/A
app pub date -
Aug 28, 1980
filing date -
Feb 8, 1980
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A thin film thickness monitor uses the successive reflection of polychromatic light from a reference or standard thin film having a varying optical thickness (n.sub.1 t.sub.1) and then from a thin film of unknown thickness (t.sub.f) or optical thickness (n.sub.f t.sub.f). The reflected intensity of light from the thin film is detected to provide a signal indicating when the optical thickness of the unknown film is equal to the optical thickness of the reference.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully