Capacitive pressure sensor
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 9, 1982
Grant Date -
N/A
app pub date -
Oct 27, 1980
filing date -
Oct 27, 1980
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A capacitive pressure sensor including a concave base member coupled to a central base support. The base member has a flange extending from its rim having a substantially planar surface. A conductive, deformable diaphragm is stretched across the flange and held by a clamping ring having a surface complementary to the flange. A substantially planar electrode is positioned substantially parallel to and displaced by a predetermined distance from the diaphragm by an electrode support member coupled to the central base support.
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