Differential pressure measuring transducer assembly

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United States of America Patent

PATENT NO 4364276
SERIAL NO

06217023

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Abstract

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A differential pressure measuring transducer assembly including a measuring diaphragm formed of semiconductor material having gauge resistance elements on one surface thereof and a central boss area of large thickness and a peripheral support flange on the other surface thereof defining therebetween an annular portion of small thickness. The measuring diaphragm is attached at the peripheral support flange to a glass support member and a metallic support member formed with pressure conducting bores respectively communicating with each other. The metallic support member is formed of material having a Young's modulus substantially equal to that of the measuring diaphragm.

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Patent Owner(s)

Patent OwnerAddress
HITACHI LTD A CORP OF JAPAN6 KANDA SURUGADAI 4-CHOME CHIYODA-KU TOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akahane, Ryozo Katsuta, JP 1 47
Matsuoka, Yoshitaka Mito, JP 10 190
Nemoto, Hideyuki Katsuta, JP 4 108
Shimazoe, Michitaka Mito, JP 4 148
Shimizu, Yasushi Katsuta, JP 140 1901
Tanabe, Masanori Hitachi, JP 18 376

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