Importance

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Abstract

A pressure transducer which produces an output capacitance signal which is unaffected by temperature or mechanical distortion. A sensing chamber is provided at the center of a pressure sensor body with the sensing chamber being filled with a sealed liquid. A moving electrode of a cantilever structure is disposed in the sensing chamber and a through hole extends from the sensing chamber to at least one side of the pressure sensor body. A pressure receiving element is disposed on at least one side of the pressure sensor body and a rod couples the pressure receiving element and the moving electrode through the through hole. Two fixed electrodes of a cantilever structure are disposed opposite the moving electrode to form first and second variable capacitance elements together with the moving electrode.

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First Claim