US Patent No: 4,377,324

Number of patents in Portfolio can not be more than 2000

Graded index Fabry-Perot optical filter device

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Abstract

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A Fabry-Perot filter device comprising a pair of low index substrates having a refractive index of less than 2.4 and mounted in parallel relationship so as to present facing sides to each other in an optical path. A coating is placed on the facing sides of each of said low index substrates, the coating having an increasing index of refraction away from the sides from about that of the substrate to above 4.0 such that the index increases in increments of from at least 2 steps to continuously. The total coating thickness is on the order of the light wavelength or more. Means are also provided to adjust the distance between the two faces, at least from a distance of from substantially less than a desired wavelength to at least one-half of the desired wavelength.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
HONEYWELL INC.MINNEAPOLIS, MN3255

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Durand, William W Edina, MN 7 329
Jain, Anil K North Oaks, MN 33 1229
Peterson, Ronald E Shoreview, MN 5 328

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Patent Info (Count) # Cites Year
 
QUALCOMM MEMS TECHNOLOGIES, INC. (213)
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6,040,937 Interferometric modulation 634 1996
5,986,796 Visible spectrum modulator arrays 486 1996
6,674,562 Interferometric modulation of radiation 673 1998
6,055,090 Interferometric modulation 450 1999
7,123,216 Photonic MEMS and structures 545 1999
7,138,984 Directly laminated touch sensitive screen 104 2001
6,867,896 Interferometric modulation of radiation 395 2001
6,680,792 Interferometric modulation of radiation 510 2001
6,650,455 Photonic mems and structures 505 2001
6,710,908 Controlling micro-electro-mechanical cavities 344 2002
7,042,643 Interferometric modulation of radiation 179 2002
7,126,738 Visible spectrum modulator arrays 136 2002
7,110,158 Photonic MEMS and structures 176 2002
7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer 30 2002
7,297,471 Method for manufacturing an array of interferometric modulators 19 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 105 2003
7,460,291 Separable modulator 53 2003
7,012,726 MEMS devices with unreleased thin film components 75 2003
7,198,973 Method for fabricating an interference display unit 102 2003
7,161,728 Area array modulation and lead reduction in interferometric modulators 148 2003
7,692,844 Interferometric modulation of radiation 20 2004
7,532,194 Driver voltage adjuster 4 2004
7,119,945 Altering temporal response of microelectromechanical elements 136 2004
7,706,050 Integrated modulator illumination 30 2004
7,193,768 Interference display cell 24 2004
7,476,327 Method of manufacture for microelectromechanical devices 38 2004
7,060,895 Modifying the electro-mechanical behavior of devices 47 2004
7,280,265 Interferometric modulation of radiation 45 2004
7,164,520 Packaging for an interferometric modulator 36 2004
7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device 50 2004
7,855,824 Method and system for color optimization in a display 19 2005
7,893,919 Display region architectures 8 2005
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7,424,198 Method and device for packaging a substrate 3 2005
7,710,632 Display device having an array of spatial light modulators with integrated color filters 29 2005
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7,379,227 Method and device for modulating light 12 2005
7,355,780 System and method of illuminating interferometric modulators using backlighting 39 2005
7,289,259 Conductive bus structure for interferometric modulator array 66 2005
7,460,246 Method and system for sensing light using interferometric elements 12 2005
7,012,732 Method and device for modulating light with a time-varying signal 62 2005
7,359,066 Electro-optical measurement of hysteresis in interferometric modulators 8 2005
7,701,631 Device having patterned spacers for backplates and method of making the same 4 2005
7,928,928 Apparatus and method for reducing perceived color shift 6 2005
7,259,449 Method and system for sealing a substrate 16 2005
7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device 4 2005
7,668,415 Method and device for providing electronic circuitry on a backplate 6 2005
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7,405,924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate 8 2005
7,368,803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion 8 2005
7,299,681 Method and system for detecting leak in electronic devices 2 2005
7,920,135 Method and system for driving a bi-stable display 4 2005
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7,535,466 System with server based control of client device display features 8 2005
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7,289,256 Electrical characterization of interferometric modulators 13 2005
7,916,103 System and method for display device with end-of-life phenomena 2 2005
7,321,456 Method and device for corner interferometric modulation 42 2005
7,372,613 Method and device for multistate interferometric light modulation 73 2005
8,362,987 Method and device for manipulating color in a display 0 2005
7,692,839 System and method of providing MEMS device with anti-stiction coating 1 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 40 2005
7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge 4 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 36 2005
7,547,565 Method of manufacturing optical interference color display 13 2005
7,527,995 Method of making prestructure for MEMS systems 30 2005
7,808,703 System and method for implementation of interferometric modulator displays 4 2005
7,349,136 Method and device for a display having transparent components integrated therein 8 2005
RE42119 Microelectrochemical systems device and method for fabricating same 7 2005
8,008,736 Analog interferometric modulator device 4 2005
7,710,629 System and method for display device with reinforcing substance 4 2005
8,124,434 Method and system for packaging a display 1 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 26 2005
7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 63 2005
8,004,504 Reduced capacitance display element 6 2005
7,553,684 Method of fabricating interferometric devices using lift-off processing techniques 6 2005
7,417,783 Mirror and mirror layer for optical modulator and method 9 2005
7,373,026 MEMS device fabricated on a pre-patterned substrate 15 2005
7,343,080 System and method of testing humidity in a sealed MEMS device 8 2005
RE40436 Hermetic seal and method to create the same 8 2005
7,304,784 Reflective display device having viewable display on both sides 44 2005
7,161,730 System and method for providing thermal compensation for an interferometric modulator display 81 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 31 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 5 2005
7,463,421 Method and device for modulating light 17 2005
7,317,568 System and method of implementation of interferometric modulators for display mirrors 2 2005
7,492,502 Method of fabricating a free-standing microstructure 12 2005
7,417,735 Systems and methods for measuring color and contrast in specular reflective devices 32 2005
7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 17 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 18 2005
7,911,428 Method and device for manipulating color in a display 19 2005
7,807,488 Display element having filter material diffused in a substrate of the display element 20 2005
7,728,800 Method and device for manipulating color in a display 0 2005
7,564,612 Photonic MEMS and structures 68 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 192 2005
7,369,294 Ornamental display device 43 2005
7,684,104 MEMS using filler material and method 11 2005
7,898,521 Device and method for wavelength filtering 21 2005
7,782,293 Device and method for wavelength filtering 0 2005
7,653,371 Selectable capacitance circuit 18 2005
7,415,186 Methods for visually inspecting interferometric modulators for defects 5 2005
7,453,579 Measurement of the dynamic characteristics of interferometric modulators 11 2005
7,236,284 Photonic MEMS and structures 93 2005
7,630,114 Diffusion barrier layer for MEMS devices 3 2005
8,014,059 System and method for charge control in a MEMS device 0 2005
7,776,631 MEMS device and method of forming a MEMS device 15 2005
7,618,831 Method of monitoring the manufacture of interferometric modulators 0 2005
7,403,323 Process control monitors for interferometric modulators 1 2005
7,369,252 Process control monitors for interferometric modulators 0 2005
7,259,865 Process control monitors for interferometric modulators 20 2005
7,795,061 Method of creating MEMS device cavities by a non-etching process 4 2005
7,916,980 Interconnect structure for MEMS device 2 2006
7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 7 2006
7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 2 2006
7,547,568 Electrical conditioning of MEMS device and insulating layer thereof 8 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 27 2006
7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 44 2006
7,483,197 Photonic MEMS and structures 18 2006
7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 13 2006
7,532,377 Movable micro-electromechanical device 37 2006
7,643,203 Interferometric optical display system with broadband characteristics 22 2006
7,903,047 Mode indicator for interferometric modulator displays 3 2006
7,711,239 Microelectromechanical device and method utilizing nanoparticles 2 2006
7,623,287 Non-planar surface structures and process for microelectromechanical systems 8 2006
7,527,996 Non-planar surface structures and process for microelectromechanical systems 5 2006
7,417,784 Microelectromechanical device and method utilizing a porous surface 48 2006
8,004,743 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display 2 2006
7,773,289 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display 0 2006
7,706,044 Optical interference display cell and method of making the same 9 2006
7,880,954 Integrated modulator illumination 15 2006
7,369,292 Electrode and interconnect materials for MEMS devices 14 2006
7,349,139 System and method of illuminating interferometric modulators using backlighting 18 2006
7,907,319 Method and device for modulating light with optical compensation 24 2006
7,161,094 Modifying the electro-mechanical behavior of devices 24 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 83 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 17 2006
7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports 6 2006
7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts 72 2006
7,187,489 Photonic MEMS and structures 90 2006
7,636,151 System and method for providing residual stress test structures 0 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 7 2006
7,835,061 Support structures for free-standing electromechanical devices 10 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 50 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 12 2006
7,388,704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 4 2006
7,566,940 Electromechanical devices having overlying support structures 12 2006
7,534,640 Support structure for MEMS device and methods therefor 15 2006
7,830,586 Transparent thin films 17 2006
7,554,711 MEMS devices with stiction bumps 43 2006
7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 6 2006
7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants 34 2006
7,660,058 Methods for etching layers within a MEMS device to achieve a tapered edge 8 2006
7,486,867 Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge 4 2006
7,580,172 MEMS device and interconnects for same 5 2006
7,545,552 Sacrificial spacer process and resultant structure for MEMS support structure 7 2006
7,619,810 Systems and methods of testing micro-electromechanical devices 2 2006
7,355,782 Systems and methods of controlling micro-electromechanical devices 6 2006
7,706,042 MEMS device and interconnects for same 4 2006
7,535,621 Aluminum fluoride films for microelectromechanical system applications 34 2006
7,652,814 MEMS device with integrated optical element 4 2007
8,284,474 Method and system for interferometric modulation in projection or peripheral devices 0 2007
7,846,344 Method and device for modulating light 1 2007
7,733,552 MEMS cavity-coating layers and methods 5 2007
8,059,326 Display devices comprising of interferometric modulator and sensor 5 2007
7,738,156 Display devices comprising of interferometric modulator and sensor 0 2007
7,625,825 Method of patterning mechanical layer for MEMS structures 2 2007
8,068,268 MEMS devices having improved uniformity and methods for making them 1 2007
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 17 2007
7,570,415 MEMS device and interconnects for same 2 2007
7,852,545 Method and device for modulating light 15 2007
7,848,004 System and method for a MEMS device 9 2007
7,830,587 Method and device for modulating light with semiconductor substrate 16 2007
7,826,120 Method and device for multi-color interferometric modulation 15 2007
7,808,694 Method and device for modulating light 15 2007
7,738,157 System and method for a MEMS device 20 2007
8,072,402 Interferometric optical modulator with broadband reflection characteristics 7 2007
7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 5 2007
7,564,613 Microelectromechanical device and method utilizing a porous surface 7 2007
7,532,386 Process for modifying offset voltage characteristics of an interferometric modulator 9 2007
8,058,549 Photovoltaic devices with integrated color interferometric film stacks 4 2007
8,111,445 Spatial light modulator with integrated optical compensation structure 6 2008
7,623,752 System and method of testing humidity in a sealed MEMS device 5 2008
7,570,865 System and method of testing humidity in a sealed MEMS device 1 2008
7,863,079 Methods of reducing CD loss in a microelectromechanical device 0 2008
7,660,031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 4 2008
8,105,496 Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer 2 2008
8,045,252 Spatial light modulator with integrated optical compensation structure 6 2008
8,040,588 System and method of illuminating interferometric modulators using backlighting 2 2008
7,688,494 Electrode and interconnect materials for MEMS devices 12 2008
8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 3 2008
8,226,836 Mirror and mirror layer for optical modulator and method 0 2008
8,169,686 Display with integrated photovoltaics 1 2008
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8,193,441 Photovoltaics with interferometric ribbon masks 1 2008
8,416,487 Photonic MEMS and structures 0 2009
8,169,687 Photonic MEMS and structures 0 2009
8,735,225 Method and system for packaging MEMS devices with glass seal 0 2009
7,830,589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 0 2009
8,077,379 Interferometric optical display system with broadband characteristics 0 2009
8,422,108 Method and device for modulating light with optical compensation 0 2009
8,126,297 MEMS device fabricated on a pre-patterned substrate 1 2010
8,164,815 MEMS cavity-coating layers and methods 0 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,817,357 Mechanical layer and methods of forming the same 0 2011
8,659,816 Mechanical layer and methods of making the same 0 2011
8,682,130 Method and device for packaging a substrate 0 2011
8,798,425 Decoupled holographic film and diffuser 0 2011
8,681,079 Interferometric optical modulator with broadband reflection characteristics 0 2011
8,643,935 Photonic MEMS and structures 0 2012
8,638,491 Device having a conductive light absorbing mask and method for fabricating same 0 2012
8,830,557 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2012
 
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Other [Check patent profile for assignment information] (1)
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