US Patent No: 4,377,324

Number of patents in Portfolio can not be more than 2000

Graded index Fabry-Perot optical filter device

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A Fabry-Perot filter device comprising a pair of low index substrates having a refractive index of less than 2.4 and mounted in parallel relationship so as to present facing sides to each other in an optical path. A coating is placed on the facing sides of each of said low index substrates, the coating having an increasing index of refraction away from the sides from about that of the substrate to above 4.0 such that the index increases in increments of from at least 2 steps to continuously. The total coating thickness is on the order of the light wavelength or more. Means are also provided to adjust the distance between the two faces, at least from a distance of from substantially less than a desired wavelength to at least one-half of the desired wavelength.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddressTotal Patents
HONEYWELL INC.MINNEAPOLIS, MN1133

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Durand, William W Edina, MN 7 342
Jain, Anil K North Oaks, MN 33 1342
Peterson, Ronald E Shoreview, MN 5 342

Cited Art Landscape

  • No Cited Art to Display

Patent Citation Ranking

Forward Cite Landscape

Patent Info (Count) # Cites Year
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
* 5,039,201 Double-pass tunable fabry-perot optical filter 12 1990
 
POPKIN FAMILY ASSETS, L.L.C. (2)
* 5,739,945 Electrically tunable optical filter utilizing a deformable multi-layer mirror 313 1996
6,597,490 Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same 161 2001
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (1)
7,244,031 Light source arrangement 1 2004
 
Qualcomm Mems Technologies Co., Ltd. (1)
7,172,915 Optical-interference type display panel and method for making the same 80 2004
 
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (1)
6,650,479 Multi-wavelength etalon 0 2002
 
McDonnell Douglas Corporation (1)
* 4,973,131 Modulator mirror 92 1989
 
BALL AEROSPACE & TECHNOLOGIES CORP. (2)
7,050,215 Method and apparatus for providing a gas correlation filter for remote sensing of atmospheric trace gases 3 2003
7,030,991 Field condensing imaging system for remote sensing of atmospheric trace gases 6 2003
 
LUCENT TECHNOLOGIES INC. (1)
6,462,876 Multi-wavelength etalon 3 1999
 
QUALCOMM MEMS TECHNOLOGIES, INC. (226)
* 5,835,255 Visible spectrum modulator arrays 535 1994
* 6,040,937 Interferometric modulation 670 1996
* 5,986,796 Visible spectrum modulator arrays 513 1996
6,674,562 Interferometric modulation of radiation 719 1998
* 6,055,090 Interferometric modulation 472 1999
7,123,216 Photonic MEMS and structures 581 1999
7,138,984 Directly laminated touch sensitive screen 126 2001
6,867,896 Interferometric modulation of radiation 414 2001
6,680,792 Interferometric modulation of radiation 545 2001
6,650,455 Photonic mems and structures 540 2001
6,710,908 Controlling micro-electro-mechanical cavities 370 2002
7,042,643 Interferometric modulation of radiation 197 2002
7,126,738 Visible spectrum modulator arrays 152 2002
7,110,158 Photonic MEMS and structures 188 2002
7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer 40 2002
7,297,471 Method for manufacturing an array of interferometric modulators 25 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 115 2003
7,460,291 Separable modulator 63 2003
7,012,726 MEMS devices with unreleased thin film components 76 2003
7,198,973 Method for fabricating an interference display unit 111 2003
7,161,728 Area array modulation and lead reduction in interferometric modulators 162 2003
7,692,844 Interferometric modulation of radiation 35 2004
7,532,194 Driver voltage adjuster 5 2004
7,119,945 Altering temporal response of microelectromechanical elements 147 2004
7,706,050 Integrated modulator illumination 39 2004
7,193,768 Interference display cell 24 2004
7,476,327 Method of manufacture for microelectromechanical devices 48 2004
7,060,895 Modifying the electro-mechanical behavior of devices 49 2004
7,280,265 Interferometric modulation of radiation 49 2004
7,164,520 Packaging for an interferometric modulator 40 2004
7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device 55 2004
7,855,824 Method and system for color optimization in a display 25 2005
7,893,919 Display region architectures 16 2005
7,813,026 System and method of reducing color shift in a display 20 2005
7,424,198 Method and device for packaging a substrate 4 2005
7,710,632 Display device having an array of spatial light modulators with integrated color filters 35 2005
7,626,751 Display device having an array of spatial light modulators with integrated color filters 0 2005
7,379,227 Method and device for modulating light 18 2005
7,355,780 System and method of illuminating interferometric modulators using backlighting 47 2005
7,289,259 Conductive bus structure for interferometric modulator array 75 2005
7,460,246 Method and system for sensing light using interferometric elements 13 2005
7,012,732 Method and device for modulating light with a time-varying signal 68 2005
7,359,066 Electro-optical measurement of hysteresis in interferometric modulators 8 2005
7,701,631 Device having patterned spacers for backplates and method of making the same 4 2005
7,928,928 Apparatus and method for reducing perceived color shift 10 2005
7,259,449 Method and system for sealing a substrate 16 2005
7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device 9 2005
7,668,415 Method and device for providing electronic circuitry on a backplate 8 2005
7,429,334 Methods of fabricating interferometric modulators by selectively removing a material 15 2005
7,420,728 Methods of fabricating interferometric modulators by selectively removing a material 17 2005
7,405,924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate 9 2005
7,368,803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion 8 2005
7,299,681 Method and system for detecting leak in electronic devices 2 2005
7,920,135 Method and system for driving a bi-stable display 11 2005
7,586,484 Controller and driver features for bi-stable display 23 2005
7,535,466 System with server based control of client device display features 19 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 57 2005
7,289,256 Electrical characterization of interferometric modulators 13 2005
7,916,103 System and method for display device with end-of-life phenomena 2 2005
7,321,456 Method and device for corner interferometric modulation 53 2005
7,372,613 Method and device for multistate interferometric light modulation 84 2005
8,362,987 Method and device for manipulating color in a display 0 2005
7,692,839 System and method of providing MEMS device with anti-stiction coating 1 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 54 2005
7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge 4 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 51 2005
7,547,565 Method of manufacturing optical interference color display 18 2005
7,527,995 Method of making prestructure for MEMS systems 40 2005
7,808,703 System and method for implementation of interferometric modulator displays 6 2005
7,349,136 Method and device for a display having transparent components integrated therein 8 2005
RE42119 Microelectrochemical systems device and method for fabricating same 12 2005
8,008,736 Analog interferometric modulator device 6 2005
7,710,629 System and method for display device with reinforcing substance 4 2005
8,124,434 Method and system for packaging a display 6 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 36 2005
7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 77 2005
8,004,504 Reduced capacitance display element 8 2005
7,553,684 Method of fabricating interferometric devices using lift-off processing techniques 6 2005
7,417,783 Mirror and mirror layer for optical modulator and method 9 2005
7,373,026 MEMS device fabricated on a pre-patterned substrate 16 2005
7,343,080 System and method of testing humidity in a sealed MEMS device 9 2005
RE40436 Hermetic seal and method to create the same 13 2005
7,304,784 Reflective display device having viewable display on both sides 55 2005
7,161,730 System and method for providing thermal compensation for an interferometric modulator display 91 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 38 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 10 2005
7,463,421 Method and device for modulating light 26 2005
7,317,568 System and method of implementation of interferometric modulators for display mirrors 3 2005
7,492,502 Method of fabricating a free-standing microstructure 12 2005
7,417,735 Systems and methods for measuring color and contrast in specular reflective devices 41 2005
7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 21 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 28 2005
7,911,428 Method and device for manipulating color in a display 24 2005
7,807,488 Display element having filter material diffused in a substrate of the display element 27 2005
7,728,800 Method and device for manipulating color in a display 0 2005
7,564,612 Photonic MEMS and structures 83 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 225 2005
7,369,294 Ornamental display device 53 2005
7,684,104 MEMS using filler material and method 14 2005
7,898,521 Device and method for wavelength filtering 27 2005
7,782,293 Device and method for wavelength filtering 0 2005
7,653,371 Selectable capacitance circuit 25 2005
7,415,186 Methods for visually inspecting interferometric modulators for defects 5 2005
7,453,579 Measurement of the dynamic characteristics of interferometric modulators 11 2005
7,236,284 Photonic MEMS and structures 104 2005
7,630,114 Diffusion barrier layer for MEMS devices 6 2005
8,014,059 System and method for charge control in a MEMS device 5 2005
7,776,631 MEMS device and method of forming a MEMS device 27 2005
7,618,831 Method of monitoring the manufacture of interferometric modulators 0 2005
7,403,323 Process control monitors for interferometric modulators 1 2005
7,369,252 Process control monitors for interferometric modulators 0 2005
7,259,865 Process control monitors for interferometric modulators 20 2005
7,795,061 Method of creating MEMS device cavities by a non-etching process 5 2005
7,916,980 Interconnect structure for MEMS device 8 2006
7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 13 2006
7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 2 2006
7,547,568 Electrical conditioning of MEMS device and insulating layer thereof 8 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 39 2006
7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 53 2006
7,483,197 Photonic MEMS and structures 23 2006
7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 13 2006
7,532,377 Movable micro-electromechanical device 49 2006
7,643,203 Interferometric optical display system with broadband characteristics 30 2006
7,903,047 Mode indicator for interferometric modulator displays 4 2006
7,711,239 Microelectromechanical device and method utilizing nanoparticles 9 2006
7,623,287 Non-planar surface structures and process for microelectromechanical systems 14 2006
7,527,996 Non-planar surface structures and process for microelectromechanical systems 11 2006
7,417,784 Microelectromechanical device and method utilizing a porous surface 60 2006
8,004,743 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display 2 2006
7,773,289 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display 0 2006
7,706,044 Optical interference display cell and method of making the same 9 2006
7,880,954 Integrated modulator illumination 23 2006
7,369,292 Electrode and interconnect materials for MEMS devices 22 2006
7,349,139 System and method of illuminating interferometric modulators using backlighting 25 2006
7,907,319 Method and device for modulating light with optical compensation 34 2006
7,161,094 Modifying the electro-mechanical behavior of devices 25 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 94 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 26 2006
7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports 12 2006
7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts 82 2006
7,187,489 Photonic MEMS and structures 102 2006
7,636,151 System and method for providing residual stress test structures 0 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 9 2006
7,835,061 Support structures for free-standing electromechanical devices 14 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 56 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 16 2006
7,388,704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 4 2006
7,566,940 Electromechanical devices having overlying support structures 20 2006
7,534,640 Support structure for MEMS device and methods therefor 20 2006
7,830,586 Transparent thin films 27 2006
7,554,711 MEMS devices with stiction bumps 55 2006
7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 7 2006
7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants 43 2006
7,660,058 Methods for etching layers within a MEMS device to achieve a tapered edge 14 2006
7,486,867 Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge 9 2006
7,580,172 MEMS device and interconnects for same 5 2006
7,545,552 Sacrificial spacer process and resultant structure for MEMS support structure 9 2006
7,619,810 Systems and methods of testing micro-electromechanical devices 7 2006
7,355,782 Systems and methods of controlling micro-electromechanical devices 11 2006
7,706,042 MEMS device and interconnects for same 5 2006
7,535,621 Aluminum fluoride films for microelectromechanical system applications 43 2006
7,652,814 MEMS device with integrated optical element 6 2007
8,284,474 Method and system for interferometric modulation in projection or peripheral devices 5 2007
7,846,344 Method and device for modulating light 6 2007
7,733,552 MEMS cavity-coating layers and methods 8 2007
8,059,326 Display devices comprising of interferometric modulator and sensor 12 2007
7,738,156 Display devices comprising of interferometric modulator and sensor 0 2007
7,625,825 Method of patterning mechanical layer for MEMS structures 3 2007
8,068,268 MEMS devices having improved uniformity and methods for making them 1 2007
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 22 2007
7,570,415 MEMS device and interconnects for same 2 2007
7,852,545 Method and device for modulating light 24 2007
7,848,004 System and method for a MEMS device 15 2007
7,830,587 Method and device for modulating light with semiconductor substrate 25 2007
7,826,120 Method and device for multi-color interferometric modulation 24 2007
7,808,694 Method and device for modulating light 25 2007
7,738,157 System and method for a MEMS device 30 2007
8,072,402 Interferometric optical modulator with broadband reflection characteristics 10 2007
9,019,183 Optical loss structure integrated in an illumination apparatus 0 2007
8,872,085 Display device having front illuminator with turning features 1 2007
7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 6 2007
7,564,613 Microelectromechanical device and method utilizing a porous surface 13 2007
7,532,386 Process for modifying offset voltage characteristics of an interferometric modulator 15 2007
8,058,549 Photovoltaic devices with integrated color interferometric film stacks 9 2007
8,111,445 Spatial light modulator with integrated optical compensation structure 10 2008
7,623,752 System and method of testing humidity in a sealed MEMS device 5 2008
7,570,865 System and method of testing humidity in a sealed MEMS device 1 2008
9,025,235 Optical interference type of color display having optical diffusion layer between substrate and electrode 0 2008
7,863,079 Methods of reducing CD loss in a microelectromechanical device 0 2008
7,660,031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 9 2008
8,105,496 Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer 7 2008
8,045,252 Spatial light modulator with integrated optical compensation structure 10 2008
8,040,588 System and method of illuminating interferometric modulators using backlighting 2 2008
7,688,494 Electrode and interconnect materials for MEMS devices 18 2008
8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 9 2008
8,226,836 Mirror and mirror layer for optical modulator and method 0 2008
8,169,686 Display with integrated photovoltaics 1 2008
8,130,440 Display with integrated photovoltaic device 4 2008
8,193,441 Photovoltaics with interferometric ribbon masks 1 2008
8,416,487 Photonic MEMS and structures 4 2009
8,169,687 Photonic MEMS and structures 0 2009
8,735,225 Method and system for packaging MEMS devices with glass seal 0 2009
7,830,589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 5 2009
8,077,379 Interferometric optical display system with broadband characteristics 0 2009
8,422,108 Method and device for modulating light with optical compensation 5 2009
8,126,297 MEMS device fabricated on a pre-patterned substrate 1 2010
8,164,815 MEMS cavity-coating layers and methods 1 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
8,928,967 Method and device for modulating light 0 2010
8,853,747 Method of making an electronic device with a curved backplate 0 2010
8,848,294 Method and structure capable of changing color saturation 0 2010
8,971,675 Interconnect structure for MEMS device 0 2011
8,963,159 Pixel via and methods of forming the same 0 2011
8,817,357 Mechanical layer and methods of forming the same 1 2011
8,659,816 Mechanical layer and methods of making the same 0 2011
8,682,130 Method and device for packaging a substrate 0 2011
8,798,425 Decoupled holographic film and diffuser 1 2011
8,681,079 Interferometric optical modulator with broadband reflection characteristics 0 2011
9,019,590 Spatial light modulator with integrated optical compensation structure 0 2011
8,964,280 Method of manufacturing MEMS devices providing air gap control 0 2012
8,970,939 Method and device for multistate interferometric light modulation 0 2012
8,643,935 Photonic MEMS and structures 0 2012
8,638,491 Device having a conductive light absorbing mask and method for fabricating same 0 2012
8,830,557 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2012
9,001,412 Electromechanical device with optical function separated from mechanical and electrical function 0 2012
8,885,244 Display device 0 2013
 
IRIDIGM DISPLAY CORPORATION (1)
7,256,922 Interferometric modulators with thin film transistors 41 2004
 
The B. F. Goodrich Company (2)
* 5,291,332 Etalons with dispersive coatings 16 1992
* 5,289,314 Coatings for laser detector etalons 6 1992
 
SVG LITHOGRAPHY, INC., A CORP OF DE (1)
* 4,588,293 Method and apparatus for inspecting photomasks to detect defects 10 1983
 
Honeywell Inc. (1)
* 4,929,063 Nonlinear tunable optical bandpass filter 11 1986
 
AVANEX CORPORATION (1)
6,317,265 Multi-path interference filter 0 2000
 
CORNING INCORPORATED (2)
* 6,046,854 Multi-path interference filter with reflective surfaces 7 1998
6,507,438 Dynamic tuning of multi-path interference filter 3 2001
 
Barr & Stroud Limited (1)
* 5,399,298 Optical filters with coatings transmissive in narrow waveband regions 10 1986
 
Qualcomm Memstechnologies, Inc. (1)
8,797,628 Display with integrated photovoltaic device 0 2010
 
CENTOCOR ORTHO BIOTECH INC. (1)
7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof 28 2004
 
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE (1)
* 6,798,940 Optical tunable filters and optical communication device incorporated therein optical tunable filters 11 2001
* Cited By Examiner