US Patent No: 4,377,324

Number of patents in Portfolio can not be more than 2000

Graded index Fabry-Perot optical filter device

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Abstract

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A Fabry-Perot filter device comprising a pair of low index substrates having a refractive index of less than 2.4 and mounted in parallel relationship so as to present facing sides to each other in an optical path. A coating is placed on the facing sides of each of said low index substrates, the coating having an increasing index of refraction away from the sides from about that of the substrate to above 4.0 such that the index increases in increments of from at least 2 steps to continuously. The total coating thickness is on the order of the light wavelength or more. Means are also provided to adjust the distance between the two faces, at least from a distance of from substantially less than a desired wavelength to at least one-half of the desired wavelength.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
HONEYWELL INC.MINNEAPOLIS, MN1127

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Durand, William W Edina, MN 7 347
Jain, Anil K New Brighton, MN 33 1480
Peterson, Ronald E Shoreview, MN 6 348

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Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
INTERNATIONAL BUSINESS MACHINES CORPORATION (1)
* 5,039,201 Double-pass tunable fabry-perot optical filter 12 1990
 
Other [Check patent profile for assignment information] (1)
* 2007/0097,134 Systems and methods of testing micro-electromechanical devices 16 2006
 
POPKIN FAMILY ASSETS, L.L.C. (1)
6,597,490 Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same 167 2001
 
ETALON, INC. (1)
* 2003/0072,070 Visible spectrum modulator arrays 288 2002
 
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. (3)
7,244,031 Light source arrangement 1 2004
* 2006/0007,683 Light source arrangement 2 2004
* 2006/0277,486 File or user interface element marking system 1 2005
 
Qualcomm Mems Technologies Co., Ltd. (1)
7,172,915 Optical-interference type display panel and method for making the same 83 2004
 
McDonnell Douglas Corporation (1)
* 4,973,131 Modulator mirror 98 1989
 
LUCENT TECHNOLOGIES INC. (1)
6,462,876 Multi-wavelength etalon 4 1999
 
SNAPTRACK, INC. (366)
* 5,835,255 Visible spectrum modulator arrays 596 1994
* 6,040,937 Interferometric modulation 702 1996
* 5,986,796 Visible spectrum modulator arrays 576 1996
6,674,562 Interferometric modulation of radiation 798 1998
* 6,055,090 Interferometric modulation 495 1999
7,123,216 Photonic MEMS and structures 613 1999
7,138,984 Directly laminated touch sensitive screen 137 2001
6,867,896 Interferometric modulation of radiation 437 2001
6,680,792 Interferometric modulation of radiation 617 2001
6,650,455 Photonic mems and structures 616 2001
6,710,908 Controlling micro-electro-mechanical cavities 437 2002
7,042,643 Interferometric modulation of radiation 219 2002
* 2002/0126,364 Interferometric modulation of radiation 61 2002
7,126,738 Visible spectrum modulator arrays 176 2002
* 2006/0139,723 VISIBLE SPECTRUM MODULATOR ARRAYS 0 2002
7,110,158 Photonic MEMS and structures 205 2002
* 2003/0043,157 Photonic MEMS and structures 54 2002
7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer 47 2002
* 2004/0058,532 Controlling electromechanical behavior of structures within a microelectromechanical systems device 310 2002
7,297,471 Method for manufacturing an array of interferometric modulators 27 2003
7,221,495 Thin film precursor stack for MEMS manufacturing 122 2003
* 2004/0263,944 Thin film precursor stack for MEMS manufacturing 32 2003
7,460,291 Separable modulator 70 2003
* 2004/0051,929 Separable modulator 53 2003
7,012,726 MEMS devices with unreleased thin film components 94 2003
7,198,973 Method for fabricating an interference display unit 118 2003
* 2004/0209,192 Method for fabricating an interference display unit 2 2003
7,161,728 Area array modulation and lead reduction in interferometric modulators 167 2003
7,692,844 Interferometric modulation of radiation 42 2004
7,532,194 Driver voltage adjuster 6 2004
* 2005/0168,431 Driver voltage adjuster 53 2004
7,119,945 Altering temporal response of microelectromechanical elements 154 2004
* 2005/0195,467 Altering temporal response of microelectromechanical elements 26 2004
7,706,050 Integrated modulator illumination 42 2004
7,193,768 Interference display cell 25 2004
* 2005/0046,948 Interference display cell and fabrication method thereof 24 2004
7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof 30 2004
* 2005/0046,922 Interferometric modulation pixels and manufacturing method thereof 247 2004
* 2005/0036,095 Color-changeable pixels of an optical interference display panel 250 2004
7,476,327 Method of manufacture for microelectromechanical devices 55 2004
7,060,895 Modifying the electro-mechanical behavior of devices 66 2004
* 2005/0249,966 Method of manufacture for microelectromechanical devices 153 2004
7,280,265 Interferometric modulation of radiation 50 2004
7,164,520 Packaging for an interferometric modulator 54 2004
* 2005/0002,082 Interferometric modulation of radiation 60 2004
7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device 57 2004
* 2006/0007,517 Structure of a micro electro mechanical system 107 2004
7,855,824 Method and system for color optimization in a display 26 2005
* 2005/0212,738 Method and system for color optimization in a display 53 2005
7,893,919 Display region architectures 21 2005
7,813,026 System and method of reducing color shift in a display 22 2005
* 2006/0077,514 System and method of reducing color shift in a display 16 2005
7,424,198 Method and device for packaging a substrate 5 2005
* 2006/0067,641 Method and device for packaging a substrate 1 2005
7,710,632 Display device having an array of spatial light modulators with integrated color filters 37 2005
* 2006/0077,512 Display device having an array of spatial light modulators with integrated color filters 20 2005
7,379,227 Method and device for modulating light 20 2005
7,355,780 System and method of illuminating interferometric modulators using backlighting 52 2005
7,289,259 Conductive bus structure for interferometric modulator array 83 2005
* 2006/0077,507 Conductive bus structure for interferometric modulator array 1 2005
* 2006/0077,510 System and method of illuminating interferometric modulators using backlighting 1 2005
* 2005/0244,949 Method and device for modulating light 25 2005
7,460,246 Method and system for sensing light using interferometric elements 14 2005
* 2006/0066,876 Method and system for sensing light using interferometric elements 5 2005
7,012,732 Method and device for modulating light with a time-varying signal 86 2005
* 2005/0231,790 Method and device for modulating light with a time-varying signal 17 2005
7,359,066 Electro-optical measurement of hysteresis in interferometric modulators 9 2005
* 2006/0066,863 Electro-optical measurement of hysteresis in interferometric modulators 6 2005
7,701,631 Device having patterned spacers for backplates and method of making the same 5 2005
* 2006/0077,145 Device having patterned spacers for backplates and method of making the same 11 2005
7,928,928 Apparatus and method for reducing perceived color shift 10 2005
* 2006/0077,122 Apparatus and method for reducing perceived color shift 30 2005
* 2006/0077,126 Apparatus and method for arranging devices into an interconnected array 21 2005
7,259,449 Method and system for sealing a substrate 18 2005
* 2006/0065,622 Method and system for xenon fluoride etching with enhanced efficiency 5 2005
* 2006/0066,557 Method and device for reflective display with time sequential color illumination 39 2005
7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device 13 2005
7,668,415 Method and device for providing electronic circuitry on a backplate 10 2005
7,429,334 Methods of fabricating interferometric modulators by selectively removing a material 17 2005
7,420,728 Methods of fabricating interferometric modulators by selectively removing a material 20 2005
7,405,924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate 11 2005
7,368,803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion 9 2005
7,299,681 Method and system for detecting leak in electronic devices 4 2005
* 2006/0077,502 Methods of fabricating interferometric modulators by selectively removing a material 0 2005
* 2006/0067,642 Method and device for providing electronic circuitry on a backplate 9 2005
* 2006/0065,043 Method and system for detecting leak in electronic devices 1 2005
* 2006/0066,932 Method of selective etching using etch stop layer 70 2005
* 2005/0250,235 Controlling electromechanical behavior of structures within a microelectromechanical systems device 25 2005
7,920,135 Method and system for driving a bi-stable display 13 2005
7,586,484 Controller and driver features for bi-stable display 25 2005
7,535,466 System with server based control of client device display features 22 2005
7,302,157 System and method for multi-level brightness in interferometric modulation 65 2005
7,289,256 Electrical characterization of interferometric modulators 15 2005
* 2006/0077,523 Electrical characterization of interferometric modulators 7 2005
* 2006/0066,504 System with server based control of client device display features 44 2005
* 2006/0067,643 System and method for multi-level brightness in interferometric modulation 1 2005
* 2006/0066,503 Controller and driver features for bi-stable display 38 2005
* 2006/0066,596 System and method of transmitting video data 30 2005
7,916,103 System and method for display device with end-of-life phenomena 2 2005
* 2006/0077,524 System and method for display device with end-of-life phenomena 9 2005
* 2006/0076,634 Method and system for packaging MEMS devices with incorporated getter 18 2005
7,321,456 Method and device for corner interferometric modulation 61 2005
* 2006/0077,515 Method and device for corner interferometric modulation 1 2005
7,372,613 Method and device for multistate interferometric light modulation 91 2005
* 2006/0077,508 Method and device for multistate interferometric light modulation 1 2005
8,362,987 Method and device for manipulating color in a display 0 2005
7,692,839 System and method of providing MEMS device with anti-stiction coating 4 2005
7,420,725 Device having a conductive light absorbing mask and method for fabricating same 68 2005
* 2006/0077,503 System and method of providing MEMS device with anti-stiction coating 30 2005
* 2006/0077,149 Method and device for manipulating color in a display 38 2005
* 2006/0077,516 Device having a conductive light absorbing mask and method for fabricating same 2 2005
7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge 5 2005
* 2006/0077,504 Method and device for protecting interferometric modulators from electrostatic discharge 6 2005
7,719,500 Reflective display pixels arranged in non-rectangular arrays 57 2005
7,547,565 Method of manufacturing optical interference color display 21 2005
7,527,995 Method of making prestructure for MEMS systems 45 2005
* 2006/0177,950 Method of manufacturing optical interferance color display 16 2005
* 2006/0066,599 Reflective display pixels arranged in non-rectangular arrays 65 2005
7,808,703 System and method for implementation of interferometric modulator displays 6 2005
7,349,136 Method and device for a display having transparent components integrated therein 10 2005
* 2006/0077,393 System and method for implementation of interferometric modulator displays 14 2005
RE42119 Microelectrochemical systems device and method for fabricating same 14 2005
8,008,736 Analog interferometric modulator device 11 2005
7,710,629 System and method for display device with reinforcing substance 6 2005
* 2006/0066,600 System and method for display device with reinforcing substance 13 2005
8,124,434 Method and system for packaging a display 7 2005
7,554,714 Device and method for manipulation of thermal response in a modulator 41 2005
* 2006/0076,637 Method and system for packaging a display 12 2005
* 2006/0077,152 Device and method for manipulation of thermal response in a modulator 49 2005
7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 84 2005
* 2006/0077,527 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator 2 2005
8,004,504 Reduced capacitance display element 9 2005
7,553,684 Method of fabricating interferometric devices using lift-off processing techniques 7 2005
* 2006/0077,153 Reduced capacitance display element 53 2005
* 2006/0067,644 Method of fabricating interferometric devices using lift-off processing techniques 3 2005
7,417,783 Mirror and mirror layer for optical modulator and method 10 2005
7,373,026 MEMS device fabricated on a pre-patterned substrate 18 2005
7,343,080 System and method of testing humidity in a sealed MEMS device 10 2005
* 2006/0077,518 Mirror and mirror layer for optical modulator and method 5 2005
* 2006/0067,646 MEMS device fabricated on a pre-patterned substrate 0 2005
RE40436 Hermetic seal and method to create the same 14 2005
* 2006/0103,643 Measuring and modeling power consumption in displays 31 2005
7,304,784 Reflective display device having viewable display on both sides 62 2005
* 2006/0077,155 Reflective display device having viewable display on both sides 14 2005
7,161,730 System and method for providing thermal compensation for an interferometric modulator display 94 2005
7,567,373 System and method for micro-electromechanical operation of an interferometric modulator 46 2005
7,936,497 MEMS device having deformable membrane characterized by mechanical persistence 14 2005
7,463,421 Method and device for modulating light 27 2005
* 2006/0077,156 MEMS device having deformable membrane characterized by mechanical persistence 71 2005
* 2006/0028,708 Method and device for modulating light 28 2005
7,317,568 System and method of implementation of interferometric modulators for display mirrors 4 2005
* 2006/0077,521 System and method of implementation of interferometric modulators for display mirrors 6 2005
7,492,502 Method of fabricating a free-standing microstructure 13 2005
7,417,735 Systems and methods for measuring color and contrast in specular reflective devices 58 2005
7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 23 2005
* 2006/0077,528 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 9 2005
* 2006/0077,529 Method of fabricating a free-standing microstructure 25 2005
* 2006/0066,856 Systems and methods for measuring color and contrast in specular reflective devices 2 2005
7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator 33 2005
* 2006/0067,649 Apparatus and method for reducing slippage between structures in an interferometric modulator 61 2005
7,911,428 Method and device for manipulating color in a display 25 2005
7,807,488 Display element having filter material diffused in a substrate of the display element 29 2005
7,564,612 Photonic MEMS and structures 91 2005
7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator 239 2005
* 2006/0066,541 Method and device for manipulating color in a display 62 2005
* 2006/0067,600 Display element having filter material diffused in a substrate of the display element 43 2005
* 2006/0067,650 Method of making a reflective display device using thin film transistor production techniques 17 2005
7,369,294 Ornamental display device 59 2005
7,684,104 MEMS using filler material and method 17 2005
* 2006/0066,936 Interferometric optical modulator using filler material and method 65 2005
7,898,521 Device and method for wavelength filtering 29 2005
* 2006/0067,633 Device and method for wavelength filtering 39 2005
7,653,371 Selectable capacitance circuit 29 2005
* 2006/0077,617 Selectable capacitance circuit 22 2005
7,415,186 Methods for visually inspecting interferometric modulators for defects 6 2005
* 2006/0067,652 Methods for visually inspecting interferometric modulators for defects 4 2005
7,453,579 Measurement of the dynamic characteristics of interferometric modulators 13 2005
7,236,284 Photonic MEMS and structures 111 2005
7,630,114 Diffusion barrier layer for MEMS devices 8 2005
* 2007/0096,300 Diffusion barrier layer for MEMS devices 18 2005
8,014,059 System and method for charge control in a MEMS device 6 2005
7,776,631 MEMS device and method of forming a MEMS device 28 2005
* 2007/0058,095 System and method for charge control in a MEMS device 11 2005
7,618,831 Method of monitoring the manufacture of interferometric modulators 1 2005
7,403,323 Process control monitors for interferometric modulators 2 2005
7,369,252 Process control monitors for interferometric modulators 1 2005
7,259,865 Process control monitors for interferometric modulators 21 2005
* 2006/0077,381 Process control monitors for interferometric modulators 3 2005
* 2006/0066,872 Process control monitors for interferometric modulators 1 2005
7,795,061 Method of creating MEMS device cavities by a non-etching process 6 2005
7,916,980 Interconnect structure for MEMS device 10 2006
* 2007/0189,654 Interconnect structure for MEMS device 6 2006
7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 15 2006
* 2007/0170,540 Silicon-rich silicon nitrides as etch stops in MEMS manufature 3 2006
7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 3 2006
* 2007/0194,414 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof 6 2006
7,547,568 Electrical conditioning of MEMS device and insulating layer thereof 10 2006
* 2007/0196,944 Electrical conditioning of MEMS device and insulating layer thereof 9 2006
7,550,810 MEMS device having a layer movable at asymmetric rates 47 2006
* 2007/0194,630 MEMS device having a layer movable at asymmetric rates 31 2006
7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 58 2006
* 2007/0206,267 Methods for producing MEMS with protective coatings using multi-component sacrificial layers 9 2006
7,483,197 Photonic MEMS and structures 26 2006
7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices 14 2006
7,532,377 Movable micro-electromechanical device 58 2006
7,643,203 Interferometric optical display system with broadband characteristics 34 2006
7,903,047 Mode indicator for interferometric modulator displays 4 2006
* 2007/0242,008 Mode indicator for interferometric modulator displays 33 2006
7,711,239 Microelectromechanical device and method utilizing nanoparticles 14 2006
7,623,287 Non-planar surface structures and process for microelectromechanical systems 18 2006
7,527,996 Non-planar surface structures and process for microelectromechanical systems 13 2006
7,417,784 Microelectromechanical device and method utilizing a porous surface 63 2006
* 2007/0249,079 Non-planar surface structures and process for microelectromechanical systems 17 2006
* 2007/0249,078 Non-planar surface structures and process for microelectromechanical systems 29 2006
8,004,743 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display 2 2006
* 2007/0247,704 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display 40 2006
7,706,044 Optical interference display cell and method of making the same 12 2006
7,880,954 Integrated modulator illumination 25 2006
7,369,292 Electrode and interconnect materials for MEMS devices 24 2006
7,349,139 System and method of illuminating interferometric modulators using backlighting 28 2006
* 2006/0209,384 System and method of illuminating interferometric modulators using backlighting 0 2006
* 2006/0198,013 Integrated modulator illumination 32 2006
7,907,319 Method and device for modulating light with optical compensation 34 2006
* 2006/0274,400 Method and device for modulating light with optical compensation 70 2006
7,161,094 Modifying the electro-mechanical behavior of devices 42 2006
* 2006/0219,435 Modifying the electro-mechanical behavior of devices 0 2006
7,372,619 Display device having a movable structure for modulating light and method thereof 101 2006
* 2006/0274,074 Display device having a movable structure for modulating light and method thereof 2 2006
7,649,671 Analog interferometric modulator device with electrostatic actuation and release 31 2006
7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports 15 2006
7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts 88 2006
* 2007/0279,753 Patterning of mechanical layer in MEMS to reduce stresses at supports 3 2006
7,187,489 Photonic MEMS and structures 106 2006
* 2006/0284,877 Photonic mems and structures 0 2006
7,636,151 System and method for providing residual stress test structures 1 2006
7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures 12 2006
* 2007/0290,961 Method and apparatus for low range bit depth enhancement for MEMS display architectures 3 2006
* 2007/0177,129 System and method for providing residual stress test structures 4 2006
7,835,061 Support structures for free-standing electromechanical devices 17 2006
7,385,744 Support structure for free-standing MEMS device and methods for forming the same 60 2006
* 2008/0055,707 Support structure for free-standing MEMS device and methods for forming the same 37 2006
7,527,998 Method of manufacturing MEMS devices providing air gap control 19 2006
7,388,704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 5 2006
* 2008/0003,737 Method of manufacturing MEMS devices providing air gap control 3 2006
* 2008/0002,210 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs 0 2006
7,566,940 Electromechanical devices having overlying support structures 23 2006
7,534,640 Support structure for MEMS device and methods therefor 22 2006
* 2007/0019,922 Support structure for MEMS device and methods therefor 3 2006
7,830,586 Transparent thin films 33 2006
7,554,711 MEMS devices with stiction bumps 64 2006
* 2006/0262,380 MEMS devices with stiction bumps 92 2006
7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 9 2006
7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants 47 2006
* 2008/0043,315 High profile contacts for microelectromechanical systems 8 2006
7,660,058 Methods for etching layers within a MEMS device to achieve a tapered edge 16 2006
7,486,867 Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge 13 2006
* 2008/0218,840 Methods for etching layers within a MEMS device to achieve a tapered edge 7 2006
7,580,172 MEMS device and interconnects for same 7 2006
7,545,552 Sacrificial spacer process and resultant structure for MEMS support structure 11 2006
* 2008/0094,686 Sacrificial spacer process and resultant structure for MEMS support structure 9 2006
7,619,810 Systems and methods of testing micro-electromechanical devices 8 2006
* 2008/0088,638 Systems and methods of testing micro-electromechanical devices 1 2006
7,355,782 Systems and methods of controlling micro-electromechanical devices 12 2006
7,706,042 MEMS device and interconnects for same 7 2006
7,535,621 Aluminum fluoride films for microelectromechanical system applications 50 2006
7,652,814 MEMS device with integrated optical element 7 2007
8,284,474 Method and system for interferometric modulation in projection or peripheral devices 6 2007
* 2007/0132,843 METHOD AND SYSTEM FOR INTERFEROMETRIC MODULATION IN PROJECTION OR PERIPHERAL DEVICES 40 2007
7,846,344 Method and device for modulating light 7 2007
7,733,552 MEMS cavity-coating layers and methods 11 2007
* 2008/0231,931 MEMS CAVITY-COATING LAYERS AND METHODS 8 2007
8,059,326 Display devices comprising of interferometric modulator and sensor 15 2007
* 2007/0253,054 DISPLAY DEVICES COMPRISING OF INTERFEROMETRIC MODULATOR AND SENSOR 75 2007
7,625,825 Method of patterning mechanical layer for MEMS structures 4 2007
8,068,268 MEMS devices having improved uniformity and methods for making them 1 2007
7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device 24 2007
7,570,415 MEMS device and interconnects for same 2 2007
* 2009/0040,590 MEMS DEVICE AND INTERCONNECTS FOR SAME 3 2007
7,852,545 Method and device for modulating light 30 2007
7,848,004 System and method for a MEMS device 17 2007
7,830,587 Method and device for modulating light with semiconductor substrate 31 2007
7,826,120 Method and device for multi-color interferometric modulation 30 2007
7,808,694 Method and device for modulating light 31 2007
7,738,157 System and method for a MEMS device 36 2007
* 2008/0088,912 SYSTEM AND METHOD FOR A MEMS DEVICE 88 2007
* 2008/0084,601 SYSTEM AND METHOD FOR A MEMS DEVICE 7 2007
* 2008/0037,093 METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION 90 2007
8,072,402 Interferometric optical modulator with broadband reflection characteristics 12 2007
* 2009/0059,346 Interferometric Optical Modulator With Broadband Reflection Characteristics 26 2007
9,019,183 Optical loss structure integrated in an illumination apparatus 0 2007
8,872,085 Display device having front illuminator with turning features 1 2007
7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 8 2007
* 2008/0279,498 MEMS STRUCTURES, METHODS OF FABRICATING MEMS COMPONENTS ON SEPARATE SUBSTRATES AND ASSEMBLY OF SAME 40 2007
7,564,613 Microelectromechanical device and method utilizing a porous surface 16 2007
* 2009/0078,316 INTERFEROMETRIC PHOTOVOLTAIC CELL 47 2007
7,532,386 Process for modifying offset voltage characteristics of an interferometric modulator 16 2007
8,058,549 Photovoltaic devices with integrated color interferometric film stacks 12 2007
8,111,445 Spatial light modulator with integrated optical compensation structure 12 2008
* 2008/0112,039 SPATIAL LIGHT MODULATOR WITH INTEGRATED OPTICAL COMPENSATION STRUCTURE 46 2008
7,623,752 System and method of testing humidity in a sealed MEMS device 6 2008
7,570,865 System and method of testing humidity in a sealed MEMS device 2 2008
* 2008/0115,569 SYSTEM AND METHOD OF TESTING HUMIDITY IN A SEALED MEMS DEVICE 1 2008
* 2008/0115,596 SYSTEM AND METHOD OF TESTING HUMIDITY IN A SEALED MEMS DEVICE 0 2008
9,025,235 Optical interference type of color display having optical diffusion layer between substrate and electrode 0 2008
7,863,079 Methods of reducing CD loss in a microelectromechanical device 0 2008
7,660,031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 11 2008
8,105,496 Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer 8 2008
8,045,252 Spatial light modulator with integrated optical compensation structure 10 2008
* 2008/0151,347 SPATIAL LIGHT MODULATOR WITH INTEGRATED OPTICAL COMPENSATION STRUCTURE 50 2008
8,040,588 System and method of illuminating interferometric modulators using backlighting 2 2008
* 2009/0225,394 SYSTEM AND METHOD OF ILLUMINATING INTERFEROMETRIC MODULATORS USING BACKLIGHTING 21 2008
* 2008/0157,413 METHOD OF MANUFACTURING OPTICAL INTERFERENCE COLOR DISPLAY 10 2008
7,688,494 Electrode and interconnect materials for MEMS devices 18 2008
8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 10 2008
* 2008/0226,929 SILICON-RICH SILICON NITRIDES AS ETCH STOP IN MEMS MANUFACTURE 20 2008
8,226,836 Mirror and mirror layer for optical modulator and method 0 2008
* 2008/0314,866 MIRROR AND MIRROR LAYER FOR OPTICAL MODULATOR AND METHOD 9 2008
8,169,686 Display with integrated photovoltaics 1 2008
8,130,440 Display with integrated photovoltaic device 7 2008
* 2009/0103,165 Display with Integrated Photovoltaics 25 2008
* 2009/0103,161 DISPLAY WITH INTEGRATED PHOTOVOLTAIC DEVICE 37 2008
* 2009/0159,123 MULTIJUNCTION PHOTOVOLTAIC CELLS 40 2008
8,193,441 Photovoltaics with interferometric ribbon masks 2 2008
* 2009/0242,024 PHOTOVOLTAICS WITH INTERFEROMETRIC BACK SIDE MASKS 29 2008
* 2009/0151,771 PHOTOVOLTAICS WITH INTERFEROMETRIC RIBBON MASKS 37 2008
* 2010/0096,011 HIGH EFFICIENCY INTERFEROMETRIC COLOR FILTERS FOR PHOTOVOLTAIC MODULES 39 2009
8,416,487 Photonic MEMS and structures 5 2009
* 2010/0096,006 MONOLITHIC IMOD COLOR ENHANCED PHOTOVOLTAIC CELL 40 2009
8,735,225 Method and system for packaging MEMS devices with glass seal 0 2009
7,830,589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 7 2009
8,077,379 Interferometric optical display system with broadband characteristics 0 2009
* 2010/0128,339 INTERFEROMETRIC OPTICAL DISPLAY SYSTEM WITH BROADBAND CHARACTERISTICS 1 2009
8,422,108 Method and device for modulating light with optical compensation 6 2009
* 2010/0214,642 METHOD AND DEVICE FOR MODULATING LIGHT WITH OPTICAL COMPENSATION 32 2009
8,126,297 MEMS device fabricated on a pre-patterned substrate 1 2010
* 2010/0129,025 MEMS DEVICE FABRICATED ON A PRE-PATTERNED SUBSTRATE 2 2010
* 2010/0245,370 EM SHIELDING FOR DISPLAY DEVICES 23 2010
* 2010/0236,624 INTERFEROMETRIC PHOTOVOLTAIC CELL 38 2010
* 2010/0220,248 PROJECTION DISPLAY 22 2010
8,164,815 MEMS cavity-coating layers and methods 4 2010
* 2010/0245,979 MEMS CAVITY-COATING LAYERS AND METHODS 1 2010
8,394,656 Method of creating MEMS device cavities by a non-etching process 0 2010
* 2010/0284,055 DISPLAY WITH INTEGRATED PHOTOVOLTAIC DEVICE 23 2010
8,928,967 Method and device for modulating light 1 2010
* 2011/0026,096 METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION 51 2010
8,853,747 Method of making an electronic device with a curved backplate 0 2010
* 2011/0053,304 METHOD OF MAKING AN ELECTRONIC DEVICE WITH A CURVED BACKPLATE 3 2010
8,848,294 Method and structure capable of changing color saturation 0 2010
9,110,289 Device for modulating light with multiple electrodes 1 2011
8,971,675 Interconnect structure for MEMS device 0 2011
9,134,527 Pixel via and methods of forming the same 0 2011
8,963,159 Pixel via and methods of forming the same 0 2011
8,817,357 Mechanical layer and methods of forming the same 1 2011
8,659,816 Mechanical layer and methods of making the same 0 2011
8,682,130 Method and device for packaging a substrate 0 2011
8,798,425 Decoupled holographic film and diffuser 2 2011
9,019,590 Spatial light modulator with integrated optical compensation structure 0 2011
8,964,280 Method of manufacturing MEMS devices providing air gap control 0 2012
8,970,939 Method and device for multistate interferometric light modulation 0 2012
8,643,935 Photonic MEMS and structures 0 2012
8,638,491 Device having a conductive light absorbing mask and method for fabricating same 2 2012
8,830,557 Methods of fabricating MEMS with spacers between plates and devices formed by same 0 2012
9,001,412 Electromechanical device with optical function separated from mechanical and electrical function 0 2012
8,885,244 Display device 0 2013
9,086,564 Conductive bus structure for interferometric modulator array 0 2013
9,097,885 Device having a conductive light absorbing mask and method for fabricating same 0 2014
 
BALL AEROSPACE & TECHNOLOGIES CORP. (2)
7,050,215 Method and apparatus for providing a gas correlation filter for remote sensing of atmospheric trace gases 4 2003
7,030,991 Field condensing imaging system for remote sensing of atmospheric trace gases 7 2003
 
BENHOV GMBH, LLC (1)
* 5,739,945 Electrically tunable optical filter utilizing a deformable multi-layer mirror 319 1996
 
QUALCOMM MEMS TECHNOLOGIES, INC. (7)
7,626,751 Display device having an array of spatial light modulators with integrated color filters 0 2005
7,728,800 Method and device for manipulating color in a display 0 2005
7,782,293 Device and method for wavelength filtering 0 2005
7,773,289 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display 0 2006
7,738,156 Display devices comprising of interferometric modulator and sensor 0 2007
8,169,687 Photonic MEMS and structures 0 2009
8,681,079 Interferometric optical modulator with broadband reflection characteristics 0 2011
 
IRIDIGM DISPLAY CORPORATION (3)
* 2005/0213,183 VISIBLE SPECTRUM MODULATOR ARRAYS 41 2002
7,256,922 Interferometric modulators with thin film transistors 44 2004
* 2006/0001,942 Interferometric modulators with thin film transistors 27 2004
 
B.F. GOODRICH COMPANY, THE (2)
* 5,291,332 Etalons with dispersive coatings 16 1992
* 5,289,314 Coatings for laser detector etalons 6 1992
 
SVG LITHOGRAPHY, INC., A CORP OF DE (1)
* 4,588,293 Method and apparatus for inspecting photomasks to detect defects 10 1983
 
Honeywell Inc. (1)
* 4,929,063 Nonlinear tunable optical bandpass filter 11 1986
 
AVANEX CORPORATION (1)
6,317,265 Multi-path interference filter 0 2000
 
CORNING INCORPORATED (2)
* 6,046,854 Multi-path interference filter with reflective surfaces 7 1998
6,507,438 Dynamic tuning of multi-path interference filter 3 2001
 
BARR & STROUD LIMITED (1)
* 5,399,298 Optical filters with coatings transmissive in narrow waveband regions 10 1986
 
Qualcomm Memstechnologies, Inc. (1)
8,797,628 Display with integrated photovoltaic device 0 2010
 
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE (1)
* 6,798,940 Optical tunable filters and optical communication device incorporated therein optical tunable filters 11 2001
 
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (1)
6,650,479 Multi-wavelength etalon 0 2002
* Cited By Examiner