US Patent No: 4,377,324
Number of patents in Portfolio can not be more than 2000
Graded index Fabry-Perot optical filter device
Stats
-
Mar 22, 1983
Issued date -
Aug 4, 1980
filing date -
06/175,159
serial no -
Expired
status
Importance
Loading Importance Indicators...
Overall
|
US Family Size
|
International Coverage
|
Patent Longevity
|
Forward Citations
|
Abstract
A Fabry-Perot filter device comprising a pair of low index substrates having a refractive index of less than 2.4 and mounted in parallel relationship so as to present facing sides to each other in an optical path. A coating is placed on the facing sides of each of said low index substrates, the coating having an increasing index of refraction away from the sides from about that of the substrate to above 4.0 such that the index increases in increments of from at least 2 steps to continuously. The total coating thickness is on the order of the light wavelength or more. Means are also provided to adjust the distance between the two faces, at least from a distance of from substantially less than a desired wavelength to at least one-half of the desired wavelength.
Loading the Abstract Image...
First Claim
Related Publications
Loading Related Publications...
- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
| Patent Owner | Address | Total Patents |
|---|---|---|
| HONEYWELL INC. | MINNEAPOLIS, MN | 3253 |
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Inventor(s)
| Inventor Name | Address | # of filed Patents | Total Citations |
|---|---|---|---|
| Durand, William W | Edina, MN | 7 | 310 |
| Jain, Anil K | North Oaks, MN | 33 | 1009 |
| Peterson, Ronald E | Shoreview, MN | 5 | 312 |
Cited Art
- No Cited Art to Display
Patent Citation Ranking
Forward Cites
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
|
|
|||
| 5,835,255 Visible spectrum modulator arrays | 460 | 1994 | |
| 6,040,937 Interferometric modulation | 573 | 1996 | |
| 5,986,796 Visible spectrum modulator arrays | 446 | 1996 | |
| 6,674,562 Interferometric modulation of radiation | 596 | 1998 | |
| 6,055,090 Interferometric modulation | 423 | 1999 | |
| 7,123,216 Photonic MEMS and structures | 482 | 1999 | |
| 7,138,984 Directly laminated touch sensitive screen | 89 | 2001 | |
| 6,867,896 Interferometric modulation of radiation | 364 | 2001 | |
| 6,680,792 Interferometric modulation of radiation | 457 | 2001 | |
| 6,650,455 Photonic mems and structures | 455 | 2001 | |
| 6,710,908 Controlling micro-electro-mechanical cavities | 307 | 2002 | |
| 7,042,643 Interferometric modulation of radiation | 155 | 2002 | |
| 7,126,738 Visible spectrum modulator arrays | 116 | 2002 | |
| 7,110,158 Photonic MEMS and structures | 158 | 2002 | |
| 7,550,794 Micromechanical systems device comprising a displaceable electrode and a charge-trapping layer | 20 | 2002 | |
| 7,297,471 Method for manufacturing an array of interferometric modulators | 17 | 2003 | |
| 7,221,495 Thin film precursor stack for MEMS manufacturing | 93 | 2003 | |
| 7,460,291 Separable modulator | 42 | 2003 | |
| 7,012,726 MEMS devices with unreleased thin film components | 65 | 2003 | |
| 7,198,973 Method for fabricating an interference display unit | 89 | 2003 | |
| 7,161,728 Area array modulation and lead reduction in interferometric modulators | 128 | 2003 | |
| 7,692,844 Interferometric modulation of radiation | 10 | 2004 | |
| 7,532,194 Driver voltage adjuster | 3 | 2004 | |
| 7,119,945 Altering temporal response of microelectromechanical elements | 120 | 2004 | |
| 7,706,050 Integrated modulator illumination | 27 | 2004 | |
| 7,193,768 Interference display cell | 22 | 2004 | |
| 7,291,921 Structure of a micro electro mechanical system and the manufacturing method thereof | 25 | 2004 | |
| 7,476,327 Method of manufacture for microelectromechanical devices | 29 | 2004 | |
| 7,060,895 Modifying the electro-mechanical behavior of devices | 38 | 2004 | |
| 7,280,265 Interferometric modulation of radiation | 40 | 2004 | |
| 7,164,520 Packaging for an interferometric modulator | 30 | 2004 | |
| 7,250,315 Method for fabricating a structure for a microelectromechanical system (MEMS) device | 45 | 2004 | |
| 7,855,824 Method and system for color optimization in a display | 15 | 2005 | |
| 7,893,919 Display region architectures | 2 | 2005 | |
| 7,813,026 System and method of reducing color shift in a display | 10 | 2005 | |
| 7,424,198 Method and device for packaging a substrate | 2 | 2005 | |
| 7,710,632 Display device having an array of spatial light modulators with integrated color filters | 22 | 2005 | |
| 7,626,751 Display device having an array of spatial light modulators with integrated color filters | 0 | 2005 | |
| 7,379,227 Method and device for modulating light | 10 | 2005 | |
| 7,355,780 System and method of illuminating interferometric modulators using backlighting | 35 | 2005 | |
| 7,289,259 Conductive bus structure for interferometric modulator array | 55 | 2005 | |
| 7,460,246 Method and system for sensing light using interferometric elements | 8 | 2005 | |
| 7,012,732 Method and device for modulating light with a time-varying signal | 53 | 2005 | |
| 7,359,066 Electro-optical measurement of hysteresis in interferometric modulators | 6 | 2005 | |
| 7,701,631 Device having patterned spacers for backplates and method of making the same | 2 | 2005 | |
| 7,928,928 Apparatus and method for reducing perceived color shift | 4 | 2005 | |
| 7,259,449 Method and system for sealing a substrate | 12 | 2005 | |
| 7,781,850 Controlling electromechanical behavior of structures within a microelectromechanical systems device | 3 | 2005 | |
| 7,668,415 Method and device for providing electronic circuitry on a backplate | 5 | 2005 | |
| 7,429,334 Methods of fabricating interferometric modulators by selectively removing a material | 12 | 2005 | |
| 7,420,728 Methods of fabricating interferometric modulators by selectively removing a material | 15 | 2005 | |
| 7,405,924 System and method for protecting microelectromechanical systems array using structurally reinforced back-plate | 7 | 2005 | |
| 7,368,803 System and method for protecting microelectromechanical systems array using back-plate with non-flat portion | 7 | 2005 | |
| 7,299,681 Method and system for detecting leak in electronic devices | 1 | 2005 | |
| 7,920,135 Method and system for driving a bi-stable display | 2 | 2005 | |
| 7,586,484 Controller and driver features for bi-stable display | 12 | 2005 | |
| 7,535,466 System with server based control of client device display features | 5 | 2005 | |
| 7,302,157 System and method for multi-level brightness in interferometric modulation | 37 | 2005 | |
| 7,289,256 Electrical characterization of interferometric modulators | 10 | 2005 | |
| 7,916,103 System and method for display device with end-of-life phenomena | 1 | 2005 | |
| 7,321,456 Method and device for corner interferometric modulation | 32 | 2005 | |
| 7,372,613 Method and device for multistate interferometric light modulation | 63 | 2005 | |
| 8,362,987 Method and device for manipulating color in a display | 0 | 2005 | |
| 7,692,839 System and method of providing MEMS device with anti-stiction coating | 1 | 2005 | |
| 7,420,725 Device having a conductive light absorbing mask and method for fabricating same | 29 | 2005 | |
| 7,405,861 Method and device for protecting interferometric modulators from electrostatic discharge | 3 | 2005 | |
| 7,719,500 Reflective display pixels arranged in non-rectangular arrays | 26 | 2005 | |
| 7,547,565 Method of manufacturing optical interference color display | 12 | 2005 | |
| 7,527,995 Method of making prestructure for MEMS systems | 20 | 2005 | |
| 7,808,703 System and method for implementation of interferometric modulator displays | 2 | 2005 | |
| 7,349,136 Method and device for a display having transparent components integrated therein | 7 | 2005 | |
| RE42119 Microelectrochemical systems device and method for fabricating same | 4 | 2005 | |
| 8,008,736 Analog interferometric modulator device | 0 | 2005 | |
| 7,710,629 System and method for display device with reinforcing substance | 3 | 2005 | |
| 8,124,434 Method and system for packaging a display | 0 | 2005 | |
| 7,554,714 Device and method for manipulation of thermal response in a modulator | 18 | 2005 | |
| 7,130,104 Methods and devices for inhibiting tilting of a mirror in an interferometric modulator | 53 | 2005 | |
| 8,004,504 Reduced capacitance display element | 3 | 2005 | |
| 7,553,684 Method of fabricating interferometric devices using lift-off processing techniques | 6 | 2005 | |
| 7,417,783 Mirror and mirror layer for optical modulator and method | 7 | 2005 | |
| 7,373,026 MEMS device fabricated on a pre-patterned substrate | 12 | 2005 | |
| 7,343,080 System and method of testing humidity in a sealed MEMS device | 8 | 2005 | |
| RE40436 Hermetic seal and method to create the same | 7 | 2005 | |
| 7,304,784 Reflective display device having viewable display on both sides | 33 | 2005 | |
| 7,161,730 System and method for providing thermal compensation for an interferometric modulator display | 78 | 2005 | |
| 7,567,373 System and method for micro-electromechanical operation of an interferometric modulator | 19 | 2005 | |
| 7,936,497 MEMS device having deformable membrane characterized by mechanical persistence | 0 | 2005 | |
| 7,463,421 Method and device for modulating light | 15 | 2005 | |
| 7,317,568 System and method of implementation of interferometric modulators for display mirrors | 1 | 2005 | |
| 7,492,502 Method of fabricating a free-standing microstructure | 11 | 2005 | |
| 7,417,735 Systems and methods for measuring color and contrast in specular reflective devices | 23 | 2005 | |
| 7,369,296 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator | 14 | 2005 | |
| 7,630,119 Apparatus and method for reducing slippage between structures in an interferometric modulator | 10 | 2005 | |
| 7,911,428 Method and device for manipulating color in a display | 14 | 2005 | |
| 7,807,488 Display element having filter material diffused in a substrate of the display element | 17 | 2005 | |
| 7,728,800 Method and device for manipulating color in a display | 0 | 2005 | |
| 7,564,612 Photonic MEMS and structures | 53 | 2005 | |
| 7,327,510 Process for modifying offset voltage characteristics of an interferometric modulator | 144 | 2005 | |
| 7,369,294 Ornamental display device | 38 | 2005 | |
| 7,684,104 MEMS using filler material and method | 7 | 2005 | |
| 7,898,521 Device and method for wavelength filtering | 17 | 2005 | |
| 7,782,293 Device and method for wavelength filtering | 0 | 2005 | |
| 7,653,371 Selectable capacitance circuit | 10 | 2005 | |
| 7,415,186 Methods for visually inspecting interferometric modulators for defects | 3 | 2005 | |
| 7,453,579 Measurement of the dynamic characteristics of interferometric modulators | 10 | 2005 | |
| 7,236,284 Photonic MEMS and structures | 82 | 2005 | |
| 7,630,114 Diffusion barrier layer for MEMS devices | 1 | 2005 | |
| 8,014,059 System and method for charge control in a MEMS device | 0 | 2005 | |
| 7,776,631 MEMS device and method of forming a MEMS device | 6 | 2005 | |
| 7,618,831 Method of monitoring the manufacture of interferometric modulators | 0 | 2005 | |
| 7,403,323 Process control monitors for interferometric modulators | 1 | 2005 | |
| 7,369,252 Process control monitors for interferometric modulators | 0 | 2005 | |
| 7,259,865 Process control monitors for interferometric modulators | 20 | 2005 | |
| 7,795,061 Method of creating MEMS device cavities by a non-etching process | 1 | 2005 | |
| 7,916,980 Interconnect structure for MEMS device | 0 | 2006 | |
| 7,382,515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture | 4 | 2006 | |
| 7,582,952 Method for providing and removing discharging interconnect for chip-on-glass output leads and structures thereof | 2 | 2006 | |
| 7,547,568 Electrical conditioning of MEMS device and insulating layer thereof | 6 | 2006 | |
| 7,550,810 MEMS device having a layer movable at asymmetric rates | 19 | 2006 | |
| 7,450,295 Methods for producing MEMS with protective coatings using multi-component sacrificial layers | 40 | 2006 | |
| 7,483,197 Photonic MEMS and structures | 16 | 2006 | |
| 7,616,369 Film stack for manufacturing micro-electromechanical systems (MEMS) devices | 11 | 2006 | |
| 7,532,377 Movable micro-electromechanical device | 28 | 2006 | |
| 7,643,203 Interferometric optical display system with broadband characteristics | 17 | 2006 | |
| 7,903,047 Mode indicator for interferometric modulator displays | 2 | 2006 | |
| 7,711,239 Microelectromechanical device and method utilizing nanoparticles | 0 | 2006 | |
| 7,623,287 Non-planar surface structures and process for microelectromechanical systems | 4 | 2006 | |
| 7,527,996 Non-planar surface structures and process for microelectromechanical systems | 4 | 2006 | |
| 7,417,784 Microelectromechanical device and method utilizing a porous surface | 42 | 2006 | |
| 8,004,743 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display | 1 | 2006 | |
| 7,773,289 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display | 0 | 2006 | |
| 7,706,044 Optical interference display cell and method of making the same | 8 | 2006 | |
| 7,880,954 Integrated modulator illumination | 14 | 2006 | |
| 7,369,292 Electrode and interconnect materials for MEMS devices | 13 | 2006 | |
| 7,349,139 System and method of illuminating interferometric modulators using backlighting | 15 | 2006 | |
| 7,907,319 Method and device for modulating light with optical compensation | 19 | 2006 | |
| 7,161,094 Modifying the electro-mechanical behavior of devices | 17 | 2006 | |
| 7,372,619 Display device having a movable structure for modulating light and method thereof | 74 | 2006 | |
| 7,649,671 Analog interferometric modulator device with electrostatic actuation and release | 7 | 2006 | |
| 7,405,863 Patterning of mechanical layer in MEMS to reduce stresses at supports | 3 | 2006 | |
| 7,321,457 Process and structure for fabrication of MEMS device having isolated edge posts | 60 | 2006 | |
| 7,187,489 Photonic MEMS and structures | 74 | 2006 | |
| 7,636,151 System and method for providing residual stress test structures | 0 | 2006 | |
| 7,471,442 Method and apparatus for low range bit depth enhancements for MEMS display architectures | 4 | 2006 | |
| 7,835,061 Support structures for free-standing electromechanical devices | 4 | 2006 | |
| 7,385,744 Support structure for free-standing MEMS device and methods for forming the same | 42 | 2006 | |
| 7,527,998 Method of manufacturing MEMS devices providing air gap control | 10 | 2006 | |
| 7,388,704 Determination of interferometric modulator mirror curvature and airgap variation using digital photographs | 3 | 2006 | |
| 7,566,940 Electromechanical devices having overlying support structures | 7 | 2006 | |
| 7,534,640 Support structure for MEMS device and methods therefor | 13 | 2006 | |
| 7,830,586 Transparent thin films | 10 | 2006 | |
| 7,554,711 MEMS devices with stiction bumps | 30 | 2006 | |
| 7,763,546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices | 3 | 2006 | |
| 7,566,664 Selective etching of MEMS using gaseous halides and reactive co-etchants | 24 | 2006 | |
| 7,660,058 Methods for etching layers within a MEMS device to achieve a tapered edge | 3 | 2006 | |
| 7,486,867 Methods for forming layers within a MEMS device using liftoff processes to achieve a tapered edge | 2 | 2006 | |
| 7,580,172 MEMS device and interconnects for same | 4 | 2006 | |
| 7,545,552 Sacrificial spacer process and resultant structure for MEMS support structure | 4 | 2006 | |
| 7,619,810 Systems and methods of testing micro-electromechanical devices | 2 | 2006 | |
| 7,355,782 Systems and methods of controlling micro-electromechanical devices | 6 | 2006 | |
| 7,706,042 MEMS device and interconnects for same | 2 | 2006 | |
| 7,535,621 Aluminum fluoride films for microelectromechanical system applications | 23 | 2006 | |
| 7,652,814 MEMS device with integrated optical element | 3 | 2007 | |
| 8,284,474 Method and system for interferometric modulation in projection or peripheral devices | 0 | 2007 | |
| 7,846,344 Method and device for modulating light | 0 | 2007 | |
| 7,733,552 MEMS cavity-coating layers and methods | 3 | 2007 | |
| 8,059,326 Display devices comprising of interferometric modulator and sensor | 1 | 2007 | |
| 7,738,156 Display devices comprising of interferometric modulator and sensor | 0 | 2007 | |
| 7,625,825 Method of patterning mechanical layer for MEMS structures | 0 | 2007 | |
| 8,068,268 MEMS devices having improved uniformity and methods for making them | 1 | 2007 | |
| 7,642,110 Method for fabricating a structure for a microelectromechanical systems (MEMS) device | 14 | 2007 | |
| 7,570,415 MEMS device and interconnects for same | 1 | 2007 | |
| 7,852,545 Method and device for modulating light | 8 | 2007 | |
| 7,848,004 System and method for a MEMS device | 5 | 2007 | |
| 7,830,587 Method and device for modulating light with semiconductor substrate | 9 | 2007 | |
| 7,826,120 Method and device for multi-color interferometric modulation | 8 | 2007 | |
| 7,808,694 Method and device for modulating light | 8 | 2007 | |
| 7,738,157 System and method for a MEMS device | 11 | 2007 | |
| 8,072,402 Interferometric optical modulator with broadband reflection characteristics | 2 | 2007 | |
| 7,719,752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same | 2 | 2007 | |
| 7,564,613 Microelectromechanical device and method utilizing a porous surface | 2 | 2007 | |
| 7,532,386 Process for modifying offset voltage characteristics of an interferometric modulator | 6 | 2007 | |
| 8,058,549 Photovoltaic devices with integrated color interferometric film stacks | 1 | 2007 | |
| 8,111,445 Spatial light modulator with integrated optical compensation structure | 1 | 2008 | |
| 7,623,752 System and method of testing humidity in a sealed MEMS device | 4 | 2008 | |
| 7,570,865 System and method of testing humidity in a sealed MEMS device | 1 | 2008 | |
| 7,863,079 Methods of reducing CD loss in a microelectromechanical device | 0 | 2008 | |
| 7,660,031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator | 2 | 2008 | |
| 8,105,496 Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer | 1 | 2008 | |
| 8,045,252 Spatial light modulator with integrated optical compensation structure | 1 | 2008 | |
| 8,040,588 System and method of illuminating interferometric modulators using backlighting | 0 | 2008 | |
| 7,688,494 Electrode and interconnect materials for MEMS devices | 10 | 2008 | |
| 8,064,124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture | 1 | 2008 | |
| 8,226,836 Mirror and mirror layer for optical modulator and method | 0 | 2008 | |
| 8,169,686 Display with integrated photovoltaics | 0 | 2008 | |
| 8,130,440 Display with integrated photovoltaic device | 0 | 2008 | |
| 8,193,441 Photovoltaics with interferometric ribbon masks | 0 | 2008 | |
| 8,416,487 Photonic MEMS and structures | 0 | 2009 | |
| 8,169,687 Photonic MEMS and structures | 0 | 2009 | |
| 7,830,589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator | 0 | 2009 | |
| 8,077,379 Interferometric optical display system with broadband characteristics | 0 | 2009 | |
| 8,422,108 Method and device for modulating light with optical compensation | 0 | 2009 | |
| 8,126,297 MEMS device fabricated on a pre-patterned substrate | 0 | 2010 | |
| 8,164,815 MEMS cavity-coating layers and methods | 0 | 2010 | |
| 8,394,656 Method of creating MEMS device cavities by a non-etching process | 0 | 2010 | |
|
|
|||
| 7,050,215 Method and apparatus for providing a gas correlation filter for remote sensing of atmospheric trace gases | 2 | 2003 | |
| 7,030,991 Field condensing imaging system for remote sensing of atmospheric trace gases | 4 | 2003 | |
|
|
|||
| 6,046,854 Multi-path interference filter with reflective surfaces | 7 | 1998 | |
| 6,507,438 Dynamic tuning of multi-path interference filter | 3 | 2001 | |
|
|
|||
| 5,739,945 Electrically tunable optical filter utilizing a deformable multi-layer mirror | 289 | 1996 | |
| 6,597,490 Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same | 133 | 2001 | |
|
|
|||
| 5,291,332 Etalons with dispersive coatings | 16 | 1992 | |
| 5,289,314 Coatings for laser detector etalons | 6 | 1992 | |
|
|
|||
| 6,650,479 Multi-wavelength etalon | 0 | 2002 | |
|
|
|||
| 6,317,265 Multi-path interference filter | 0 | 2000 | |
|
|
|||
| 5,399,298 Optical filters with coatings transmissive in narrow waveband regions | 2 | 1986 | |
|
|
|||
| 6,798,940 Optical tunable filters and optical communication device incorporated therein optical tunable filters | 11 | 2001 | |
|
|
|||
| 7,244,031 Light source arrangement | 0 | 2004 | |
|
|
|||
| 4,929,063 Nonlinear tunable optical bandpass filter | 7 | 1986 | |
|
|
|||
| 5,039,201 Double-pass tunable fabry-perot optical filter | 12 | 1990 | |
|
|
|||
| 7,256,922 Interferometric modulators with thin film transistors | 27 | 2004 | |
|
|
|||
| 6,462,876 Multi-wavelength etalon | 2 | 1999 | |
|
|
|||
| 4,973,131 Modulator mirror | 73 | 1989 | |
|
|
|||
| 7,172,915 Optical-interference type display panel and method for making the same | 69 | 2004 | |
|
|
|||
| 4,588,293 Method and apparatus for inspecting photomasks to detect defects | 10 | 1983 | |
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |