Graded index Fabry-Perot optical filter device

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United States of America Patent

PATENT NO 4377324
SERIAL NO

06175159

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Abstract

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A Fabry-Perot filter device comprising a pair of low index substrates having a refractive index of less than 2.4 and mounted in parallel relationship so as to present facing sides to each other in an optical path. A coating is placed on the facing sides of each of said low index substrates, the coating having an increasing index of refraction away from the sides from about that of the substrate to above 4.0 such that the index increases in increments of from at least 2 steps to continuously. The total coating thickness is on the order of the light wavelength or more. Means are also provided to adjust the distance between the two faces, at least from a distance of from substantially less than a desired wavelength to at least one-half of the desired wavelength.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
Honeywell Inc.MINNEAPOLIS, MN1126

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Durand, William W Edina, MN 7 349
Jain, Anil K New Brighton, MN 33 1552
Peterson, Ronald E Shoreview, MN 6 351

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Patent Info (Count) # Cites Year
 
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RE40436 Hermetic seal and method to create the same 14 2005
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7807488 Display element having filter material diffused in a substrate of the display element 29 2005
7564612 Photonic MEMS and structures 92 2005
7327510 Process for modifying offset voltage characteristics of an interferometric modulator 240 2005
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7369294 Ornamental display device 59 2005
7684104 MEMS using filler material and method 17 2005
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7236284 Photonic MEMS and structures 112 2005
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7776631 MEMS device and method of forming a MEMS device 28 2005
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7382515 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 16 2006
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7547568 Electrical conditioning of MEMS device and insulating layer thereof 10 2006
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7372619 Display device having a movable structure for modulating light and method thereof 102 2006
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7187489 Photonic MEMS and structures 107 2006
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7636151 System and method for providing residual stress test structures 2 2006
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7835061 Support structures for free-standing electromechanical devices 18 2006
7385744 Support structure for free-standing MEMS device and methods for forming the same 61 2006
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7527998 Method of manufacturing MEMS devices providing air gap control 20 2006
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* 2008/0003,737 Method of manufacturing MEMS devices providing air gap control 3 2006
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7566940 Electromechanical devices having overlying support structures 24 2006
7534640 Support structure for MEMS device and methods therefor 23 2006
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7830586 Transparent thin films 34 2006
7554711 MEMS devices with stiction bumps 67 2006
* 2006/0262,380 MEMS devices with stiction bumps 93 2006
7763546 Methods for reducing surface charges during the manufacture of microelectromechanical systems devices 10 2006
7566664 Selective etching of MEMS using gaseous halides and reactive co-etchants 47 2006
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7660058 Methods for etching layers within a MEMS device to achieve a tapered edge 16 2006
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7580172 MEMS device and interconnects for same 7 2006
7545552 Sacrificial spacer process and resultant structure for MEMS support structure 11 2006
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7355782 Systems and methods of controlling micro-electromechanical devices 12 2006
7706042 MEMS device and interconnects for same 7 2006
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7652814 MEMS device with integrated optical element 7 2007
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7846344 Method and device for modulating light 7 2007
7733552 MEMS cavity-coating layers and methods 11 2007
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8059326 Display devices comprising of interferometric modulator and sensor 16 2007
* 2007/0253,054 DISPLAY DEVICES COMPRISING OF INTERFEROMETRIC MODULATOR AND SENSOR 75 2007
7625825 Method of patterning mechanical layer for MEMS structures 4 2007
8068268 MEMS devices having improved uniformity and methods for making them 1 2007
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* 2009/0040,590 MEMS DEVICE AND INTERCONNECTS FOR SAME 3 2007
7852545 Method and device for modulating light 30 2007
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* 2008/0084,601 SYSTEM AND METHOD FOR A MEMS DEVICE 7 2007
* 2008/0037,093 METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION 90 2007
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9019183 Optical loss structure integrated in an illumination apparatus 0 2007
8872085 Display device having front illuminator with turning features 1 2007
7719752 MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same 10 2007
* 2008/0279,498 MEMS STRUCTURES, METHODS OF FABRICATING MEMS COMPONENTS ON SEPARATE SUBSTRATES AND ASSEMBLY OF SAME 44 2007
7564613 Microelectromechanical device and method utilizing a porous surface 17 2007
* 2009/0078,316 INTERFEROMETRIC PHOTOVOLTAIC CELL 51 2007
7532386 Process for modifying offset voltage characteristics of an interferometric modulator 16 2007
8058549 Photovoltaic devices with integrated color interferometric film stacks 14 2007
* 2009/0101,192 PHOTOVOLTAIC DEVICES WITH INTEGRATED COLOR INTERFEROMETRIC FILM STACKS 52 2007
8111445 Spatial light modulator with integrated optical compensation structure 12 2008
* 2008/0112,039 SPATIAL LIGHT MODULATOR WITH INTEGRATED OPTICAL COMPENSATION STRUCTURE 46 2008
7623752 System and method of testing humidity in a sealed MEMS device 7 2008
7570865 System and method of testing humidity in a sealed MEMS device 3 2008
* 2008/0115,569 SYSTEM AND METHOD OF TESTING HUMIDITY IN A SEALED MEMS DEVICE 1 2008
* 2008/0115,596 SYSTEM AND METHOD OF TESTING HUMIDITY IN A SEALED MEMS DEVICE 0 2008
9025235 Optical interference type of color display having optical diffusion layer between substrate and electrode 0 2008
7863079 Methods of reducing CD loss in a microelectromechanical device 2 2008
7660031 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 11 2008
8105496 Method of fabricating MEMS devices (such as IMod) comprising using a gas phase etchant to remove a layer 8 2008
8045252 Spatial light modulator with integrated optical compensation structure 10 2008
* 2008/0151,347 SPATIAL LIGHT MODULATOR WITH INTEGRATED OPTICAL COMPENSATION STRUCTURE 50 2008
8040588 System and method of illuminating interferometric modulators using backlighting 2 2008
* 2009/0225,394 SYSTEM AND METHOD OF ILLUMINATING INTERFEROMETRIC MODULATORS USING BACKLIGHTING 21 2008
* 2008/0157,413 METHOD OF MANUFACTURING OPTICAL INTERFERENCE COLOR DISPLAY 10 2008
7688494 Electrode and interconnect materials for MEMS devices 18 2008
8064124 Silicon-rich silicon nitrides as etch stops in MEMS manufacture 10 2008
* 2008/0226,929 SILICON-RICH SILICON NITRIDES AS ETCH STOP IN MEMS MANUFACTURE 20 2008
8226836 Mirror and mirror layer for optical modulator and method 0 2008
* 2008/0314,866 MIRROR AND MIRROR LAYER FOR OPTICAL MODULATOR AND METHOD 9 2008
8169686 Display with integrated photovoltaics 2 2008
8130440 Display with integrated photovoltaic device 9 2008
* 2009/0103,165 Display with Integrated Photovoltaics 25 2008
* 2009/0103,161 DISPLAY WITH INTEGRATED PHOTOVOLTAIC DEVICE 39 2008
* 2009/0159,123 MULTIJUNCTION PHOTOVOLTAIC CELLS 40 2008
8193441 Photovoltaics with interferometric ribbon masks 2 2008
* 2009/0242,024 PHOTOVOLTAICS WITH INTERFEROMETRIC BACK SIDE MASKS 29 2008
* 2009/0151,771 PHOTOVOLTAICS WITH INTERFEROMETRIC RIBBON MASKS 38 2008
* 2010/0096,011 HIGH EFFICIENCY INTERFEROMETRIC COLOR FILTERS FOR PHOTOVOLTAIC MODULES 39 2009
8416487 Photonic MEMS and structures 5 2009
* 2010/0096,006 MONOLITHIC IMOD COLOR ENHANCED PHOTOVOLTAIC CELL 40 2009
8735225 Method and system for packaging MEMS devices with glass seal 0 2009
7830589 Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator 7 2009
8077379 Interferometric optical display system with broadband characteristics 0 2009
* 2010/0128,339 INTERFEROMETRIC OPTICAL DISPLAY SYSTEM WITH BROADBAND CHARACTERISTICS 1 2009
8422108 Method and device for modulating light with optical compensation 6 2009
* 2010/0214,642 METHOD AND DEVICE FOR MODULATING LIGHT WITH OPTICAL COMPENSATION 32 2009
8126297 MEMS device fabricated on a pre-patterned substrate 1 2010
* 2010/0129,025 MEMS DEVICE FABRICATED ON A PRE-PATTERNED SUBSTRATE 2 2010
* 2010/0245,370 EM SHIELDING FOR DISPLAY DEVICES 23 2010
* 2010/0236,624 INTERFEROMETRIC PHOTOVOLTAIC CELL 38 2010
* 2010/0220,248 PROJECTION DISPLAY 22 2010
8164815 MEMS cavity-coating layers and methods 4 2010
* 2010/0245,979 MEMS CAVITY-COATING LAYERS AND METHODS 1 2010
8394656 Method of creating MEMS device cavities by a non-etching process 0 2010
* 2010/0284,055 DISPLAY WITH INTEGRATED PHOTOVOLTAIC DEVICE 25 2010
8928967 Method and device for modulating light 3 2010
* 2011/0026,096 METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION 51 2010
8853747 Method of making an electronic device with a curved backplate 0 2010
* 2011/0053,304 METHOD OF MAKING AN ELECTRONIC DEVICE WITH A CURVED BACKPLATE 3 2010
8848294 Method and structure capable of changing color saturation 0 2010
9110289 Device for modulating light with multiple electrodes 3 2011
* 2011/0170,166 DEVICE FOR MODULATING LIGHT WITH MULTIPLE ELECTRODES 36 2011
8971675 Interconnect structure for MEMS device 1 2011
9134527 Pixel via and methods of forming the same 1 2011
8963159 Pixel via and methods of forming the same 1 2011
8817357 Mechanical layer and methods of forming the same 2 2011
8659816 Mechanical layer and methods of making the same 0 2011
8682130 Method and device for packaging a substrate 0 2011
8798425 Decoupled holographic film and diffuser 2 2011
9019590 Spatial light modulator with integrated optical compensation structure 0 2011
8964280 Method of manufacturing MEMS devices providing air gap control 1 2012
8970939 Method and device for multistate interferometric light modulation 0 2012
8643935 Photonic MEMS and structures 0 2012
8638491 Device having a conductive light absorbing mask and method for fabricating same 3 2012
8830557 Methods of fabricating MEMS with spacers between plates and devices formed by same 1 2012
9001412 Electromechanical device with optical function separated from mechanical and electrical function 1 2012
8885244 Display device 0 2013
9086564 Conductive bus structure for interferometric modulator array 1 2013
9097885 Device having a conductive light absorbing mask and method for fabricating same 1 2014
 
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BENHOV GMBH, LLC (1)
* 5739945 Electrically tunable optical filter utilizing a deformable multi-layer mirror 320 1996
 
QUALCOMM MEMS TECHNOLOGIES, INC. (7)
7626751 Display device having an array of spatial light modulators with integrated color filters 0 2005
7728800 Method and device for manipulating color in a display 0 2005
7782293 Device and method for wavelength filtering 0 2005
7773289 Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display 0 2006
7738156 Display devices comprising of interferometric modulator and sensor 0 2007
8169687 Photonic MEMS and structures 0 2009
8681079 Interferometric optical modulator with broadband reflection characteristics 0 2011
 
IRIDIGM DISPLAY CORPORATION (3)
* 2005/0213,183 VISIBLE SPECTRUM MODULATOR ARRAYS 41 2002
7256922 Interferometric modulators with thin film transistors 44 2004
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BF Goodrich Company (2)
* 5291332 Etalons with dispersive coatings 16 1992
* 5289314 Coatings for laser detector etalons 6 1992
 
SVG LITHOGRAPHY, INC., A CORP OF DE (1)
* 4588293 Method and apparatus for inspecting photomasks to detect defects 10 1983
 
Honeywell Inc. (1)
* 4929063 Nonlinear tunable optical bandpass filter 12 1986
 
AVANEX CORPORATION (1)
6317265 Multi-path interference filter 0 2000
 
CORNING INCORPORATED (2)
* 6046854 Multi-path interference filter with reflective surfaces 7 1998
6507438 Dynamic tuning of multi-path interference filter 3 2001
 
BARR & STROUD LIMITED (1)
* 5399298 Optical filters with coatings transmissive in narrow waveband regions 10 1986
 
Qualcomm Memstechnologies, Inc. (1)
8797628 Display with integrated photovoltaic device 1 2010
 
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE (1)
* 6798940 Optical tunable filters and optical communication device incorporated therein optical tunable filters 11 2001
 
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD. (1)
6650479 Multi-wavelength etalon 0 2002
* Cited By Examiner