Scanning contaminant and defect detector

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 4378159
SERIAL NO

06249226

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A scanning laser contaminant and defect detector for reflective surfaces, having a light collector for increasing sensitivity to scattered light. The collector is preferably one quadrant of a spherical shell cradled between V-shaped reflective side walls. The collector has beam entrance and exit ports, as well as a detector port where a light detector resides. The collector is placed in proximity to a surface to be inspected. Light scattered from the test surface is directed to the reflective crown surface, then to the reflective side walls and ultimately to the detector.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
TENCOR INSTRUMENTS A CORP OF CA2400 CHARLESTON ROAD MOUNTAIN VIEW CA 94043

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Galbraith, Lee K Mountain View, CA 8 448

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation