Fabrication of thin film resistors and capacitors
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
May 31, 1983
Grant Date -
N/A
app pub date -
Oct 7, 1980
filing date -
Oct 7, 1980
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Disclosed is a method for fabricating a circuit including thin film resistors (15) and capacitors (12, 13, 14, 16) on a single substrate whereby stabilization is effected after all such components are completely formed. A high pressure steam atmosphere is utilized for stabilization so that the resistors can be stabilized at lower temperatures and/or times and the capacitors are not degraded.
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