Importance

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Abstract

A capacitive pressure sensor has a diaphragm means a portion of which is conductive which forms a first capacitor electrode. The sensor also has a reference disc means a portion of which is conductive which forms a second capacitive electrode. The diaphragm means and the reference disc means are supported in a spaced, over-lying relationship to each other by a peripheral spacer means. Responsive to pressure, the diaphragm means deflects relative to the reference disc means thus changing the capacitive spacing of the diaphragm means and the reference disc means. The diaphragm means, reference disc means and spacer means are formed from substantially the same material. The spacer means is disposed between the diaphragm means and the reference disc means adjacent their outer edges and the diaphragm means, reference disc means and spacer means are then fused together.

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First Claim