Multiple-cavity variable capacitance pressure transducer
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United States of America Patent
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Jun 28, 1983
Grant Date -
N/A
app pub date -
Aug 26, 1981
filing date -
Aug 26, 1981
priority date (Note) -
Expired
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Abstract
A plurality of recesses and interconnecting paths are etched into the surface of a silicon wafer. A plate of borosilicate glass carrying thin-film metal deposits in a corresponding pattern is electrostatically bonded to the silicon to form a multiple-cavity variable capacitance pressure transducer.
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