Metrology instrument for measuring vertical profiles of integrated circuits and the like
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United States of America Patent
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Jul 5, 1983
Grant Date -
N/A
app pub date -
Sep 28, 1981
filing date -
Sep 28, 1981
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A surface profile measuring instrument, which has a stylus supported on a linear elongated beam for linear scanning. The beam is supported by a mounting mechanism which compensates for tilt by means of a servo. The stylus is pushed and pulled along the beam for linear scans of desired length.
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Cited Art Landscape
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