Stripping compositions and methods of stripping resists
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United States of America Patent
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-
Aug 30, 1983
Grant Date -
N/A
app pub date -
Sep 2, 1982
filing date -
Sep 2, 1982
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Stripping compositions for removing resist materials from substrates comprise compositions of a 2-pyrrolidinone compound and a dialkyl sulfone compound. Either or both of polyethylene glycol and a diethylene glycol monoalkyl ether may be added to provide even more effective stripping compositions.
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