Natural lithographic fabrication of microstructures over large areas

United States of America Patent

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Oct 4, 1983
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app pub date
Mar 29, 1982
filing date
Dec 31, 1981

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Expired

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Abstract

Large area random and mosaic arrays of identical submicron microcolumnar structures can be produced on surfaces by directionally ion etching a monolayer film of spherical colloidal particles.

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EXXON RESEARCH AND ENGINEERING COMPANY A DE CORP	DE

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Inventor Name	Address	# of filed Patents	Total Citations
Deckman, Harry W	Clinton, NJ	113	5249
Dunsmuir, John H	Madison, NJ	8	376

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Natural lithographic fabrication of microstructures over large areas

Number of patents in Portfolio can not be more than 2000

United States of America Patent

06363019

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PATENT NO	4407695
SERIAL NO	06363019
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06363019

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