Projection aligner with specific means for bending mirror
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United States of America Patent
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-
Oct 11, 1983
Grant Date -
N/A
app pub date -
May 7, 1981
filing date -
May 7, 1981
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A projection aligner is provided wherein anamorphic metric distortion can be introduced in the projection image by employing a bending mirror that makes a slight change in magnification along one axis of the image. In one embodiment of the invention a pneumatic bending mechanism is employed and in another embodiment, a mechanical system is employed.
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Cited Art Landscape
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