System for contactless testing of multi-layer ceramics
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United States of America Patent
Stats
-
Nov 15, 1983
Grant Date -
N/A
app pub date -
May 26, 1981
filing date -
May 26, 1981
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A system of testing the continuity of electrical conductors extending through an insulating layer without contact. A flood gun irradiates one side of the body to charge the exposed conductors to a given potential. A steerable electron beam scans the front side to generate secondary electron emission from those conductors. The secondary emission is enhanced from conductors with conductivity between front side and back side as a result of the surface potential established by the rear flood beam. The secondary emission varies depending on the state of continuity in the three dimensional network of conductors and produces signals at the detector which allow clear discrimination between uninterrupted and interrupted conductors. The system is applicable for unfired ceramics where contact destroys the specimen.
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