Rotary coating apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 22, 1983
Grant Date -
N/A
app pub date -
Feb 9, 1982
filing date -
Feb 14, 1981
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The present invention relates to a rotary coating apparatus wherein liquid to be applied (diffusion agent, photo resist, and others) is dropped through a nozzle on a rotating glass plate or semiconductor wafer seated on top of a spindle to form coatings over their surfaces and a cap is fitted on the lower surface of the nozzle when not in use to provide sealing so that the space enclosed with said nozzle and said cap is filled with solvent vapor.
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Cited Art Landscape
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