Method for ion-aided coating on electrically insulating substrates
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United States of America Patent
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Dec 6, 1983
Grant Date -
N/A
app pub date -
Nov 3, 1981
filing date -
Dec 4, 1980
priority date (Note) -
Expired
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Abstract
The present invention is directed to coating low-conductive or non-conductive materials in a vacuum, such as coating electrically-insulating substrates, by operating a plasma source comprising a thermionic cathode and anode with the anode-voltage continuously alternating between an ignition voltage U.sub.Z and an extinction voltage U.sub.L at a frequency of between several kHz and several hundred kHz, the thermionic cathode continuously emitting electrons.
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