Mechanical vibrating element
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United States of America Patent
Stats
-
Dec 20, 1983
Grant Date -
N/A
app pub date -
Mar 11, 1981
filing date -
Apr 4, 1980
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Herein disclosed is a mechanical vibrating element which can be used as a resonator made operative to resonate in a predetermined frequency, a filter having a frequency selecting property or an optical deflector adapted to be mechanically dislocated in accordance with an input signal for deflecting an optical beam. The mechanical vibrating element according to the present invention is characterized in that a single insulating substrate constructs a frame and a moving portion supported by the frame, in that the moving portion is formed with a conductive pattern or a coil, and in that an electric current is fed to the conductor or the coil, while appling a magnetic field in the same direction as the plane direction of the insulating substrate, so that the moving portions may be mechanically vibrated.
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