Pressure transducer with an invariable reference capacitor
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United States of America Patent
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-
Dec 20, 1983
Grant Date -
N/A
app pub date -
May 21, 1982
filing date -
May 21, 1982
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A quartz capacitive pressure transducer including a sensing plate and a reference plate disposed on one quartz substrate which are opposed across a gap by a common plate on another quartz substrate to form capacitances. The substrates are maintained in their opposing relationship by an annular frit which seals a chamber between the substrates to a reference pressure. The reference plate is disposed in the area occupied by the frit annulus to provide a reference capacitance that has a zero pressure gradient.
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Cited Art Landscape
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