Positioning apparatus
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United States of America Patent
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-
Jan 3, 1984
Issued Date -
N/A
app pub date -
Mar 7, 1983
filing date -
Jul 10, 1980
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A positioning apparatus includes a projecting means for projecting plural coherent light beams onto an object to be aligned. The projecting means comprises plural converging means for forming each coherent light beam into a stripe-shaped beam extended in a direction substantially perpendicularly to the scanning direction of said scanning means, and each of said alignment marks comprises plural short line segments arranged in a stripe extended in a direction substantially perpendicular to the scanning direction of said scanning means and each inclined approximately by 45.degree. with respect to said scanning direction. Therefore, the alignment mark can be clearly identified from the circuit patterns by relatively rough preliminary alignment even if such mark is positioned in a narrow space between the chips for example for LSI.
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