Stripping compositions and methods of stripping resists
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United States of America Patent
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-
Jan 31, 1984
Issued Date -
N/A
app pub date -
Aug 17, 1982
filing date -
Sep 23, 1981
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Stripping compositions for removing resist materials from substrates comprise compositions of a 2-pyrrolidinone compound and a diethylene glycol monoalkyl ether compound. Polyethylene glycol may be added to provide even more effective stripping compositions.
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