Annealed CVD molybdenum thin film surface
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United States of America Patent
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Feb 14, 1984
Issued Date -
N/A
app pub date -
Dec 19, 1979
filing date -
Dec 19, 1979
priority date (Note) -
Expired
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Abstract
Molybdenum thin films deposited by pyrolytic decomposition of Mo(CO).sub.6 attain, after anneal in a reducing atmosphere at temperatures greater than 700.degree. C., infrared reflectance values greater than reflectance of supersmooth bulk molybdenum. Black molybdenum films deposited under oxidizing conditions and annealed, when covered with an anti-reflecting coating, approach the ideal solar collector characteristic of visible light absorber and infrared energy reflector.
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