Air track apparatus
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United States of America Patent
Stats
-
Apr 24, 1984
Grant Date -
N/A
app pub date -
Dec 1, 1981
filing date -
Dec 1, 1981
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In the air track system disclosed herein, reticles used in a microlithographic imaging system are transported on an air track and are guided from one side by means of vertically directed air jets which maintain an essentially controlled gap between the edge of the reticle and a side rail extending along the track.
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