Etching method of conductive film

United States of America Patent

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May 15, 1984
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N/A
app pub date
Dec 13, 1982
filing date
Dec 28, 1981

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Expired

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Abstract

A conductive film formed on a substrate can be etched by coating an etching solution containing 0 to 30 wt % of polyhydric alcohol and tackified to a viscosity of at least 10 cps.

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DAICEL CHEMICAL INDUSTRIES LTD	OSAKA JAPAN OSAKA

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Inventor Name	Address	# of filed Patents	Total Citations
Hiraishi, Masanori	Himeji, JP	14	266
Sugata, Masashi	Hyogo, JP	1	15

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Etching method of conductive film

Number of patents in Portfolio can not be more than 2000

United States of America Patent

06449091

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PATENT NO	4448637
SERIAL NO	06449091
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