Surface acoustic wave (SAW) pressure sensor structure

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United States of America Patent

PATENT NO 4454440
SERIAL NO

06126084

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A surface acoustic wave (SAW) pressure sensor is mechanically supported within a vacuum sealing structure by a cylindrical metal sleeve which isolates the SAW sensor substrate from induced thermal strain resulting from temperature cycling of the structure, and which provides for a fluid conduit through the vacuum environment from the sensor diaphragm to an orifice formed through the wall of the structure.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
UNITED TECHNOLOGIES CORPORATIONHARTFORD, CT4204

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cullen, Donald E Manchester, CT 13 221

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Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
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8629599 Mechanical resonating structures including a temperature compensation structure 4 2011
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* Cited By Examiner