US Patent No: 4,454,440

Number of patents in Portfolio can not be more than 2000

Surface acoustic wave (SAW) pressure sensor structure

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Abstract

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A surface acoustic wave (SAW) pressure sensor is mechanically supported within a vacuum sealing structure by a cylindrical metal sleeve which isolates the SAW sensor substrate from induced thermal strain resulting from temperature cycling of the structure, and which provides for a fluid conduit through the vacuum environment from the sensor diaphragm to an orifice formed through the wall of the structure.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
UNITED TECHNOLOGIES CORPORATIONHARTFORD, CT3496

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cullen, Donald E Manchester, CT 13 215

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Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
HONEYWELL INTERNATIONAL INC. (17)
6,907,787 Surface acoustic wave pressure sensor with microstructure sensing elements 18 2003
7,082,835 Pressure sensor apparatus and method 19 2003
7,047,813 Sensor slip fit apparatus and method 1 2003
6,962,084 Sensor with molded sensor diaphragm cover 5 2003
6,931,934 Sensor top hat cover apparatus and method 1 2003
6,964,198 Sensor testing system and method 5 2004
7,070,086 Sensor pre-load and weld fixture apparatus and method 1 2004
7,059,511 Adjustable force and position pre-load welding fixture 0 2004
7,136,683 Surface acoustic wave sensor and radio frequency identification interrogator fixture 3 2004
7,000,461 Patch wireless test fixture 1 2004
7,000,298 Method a quartz sensor 10 2004
7,129,828 Encapsulated surface acoustic wave sensor 7 2004
7,205,701 Passive wireless acoustic wave chemical sensor 7 2004
7,198,981 Vacuum sealed surface acoustic wave pressure sensor 5 2004
* 7,017,416 Disposable pressure diaphragm and wireless sensor systems and methods 5 2004
7,100,452 Surface acoustic wave multiple sense element 6 2004
7,165,455 Surface acoustic wave sensor methods and systems 12 2004
 
EPCOS AG (8)
7,388,281 Encapsulated electronic component and production method 17 2003
7,608,789 Component arrangement provided with a carrier substrate 6 2004
7,544,540 Encapsulated electrical component and production method 6 2005
8,582,788 MEMS microphone 1 2006
8,184,845 Electrical module comprising a MEMS microphone 6 2006
8,229,139 MEMS microphone, production method and method for installing 4 2006
8,169,041 MEMS package and method for the production thereof 3 2006
8,432,007 MEMS package and method for the production thereof 2 2011
 
SAND9, INC. (5)
* 8,686,614 Multi-port mechanical resonating devices and related methods 0 2009
8,736,388 Oscillators having arbitrary frequencies and related systems and methods 0 2010
8,228,127 Oscillators having arbitrary frequencies and related systems and methods 5 2010
8,604,888 Oscillators having arbitrary frequencies and related systems and methods 0 2010
8,704,604 Oscillators having arbitrary frequencies and related systems and methods 0 2011
 
ENDRESS + HAUSER GMBH + CO. KG (2)
* 5,539,611 Interface connection through an insulating part 34 1992
* 5,670,063 Method for making an interface connection through an insulating part 22 1996
 
SAND 9, INC. (2)
8,629,599 Mechanical resonating structures including a temperature compensation structure 0 2011
8,362,675 Mechanical resonating structures including a temperature compensation structure 1 2011
 
The Goodyear Tire & Rubber Company (2)
* 7,096,736 Passive tire pressure sensor and method 2 2003
7,263,892 Passive tire pressure sensor and method 2 2006
 
EMF Corporation (1)
* 4,890,825 Paper sheet stacking and jogging apparatus 16 1988
 
IMPERIAL COLLEGE INNOVATIONS LIMITED (1)
8,764,677 Implantable surface acoustic wave devices for long term clinical monitoring 0 2004
 
KNOWLES ELECTRONICS, LLC (1)
* 7,242,089 Miniature silicon condenser microphone 54 2005
 
LG INNOTEK CO., LTD. (1)
* 7,459,828 Saw sensor device using slit acoustic wave and method thereof 1 2003
 
MEASUREMENT SPECIALTIES, INC. (1)
6,938,490 Isolation technique for pressure sensing structure 9 2003
 
MICROTECHNOLOGY CENTRE MANAGEMENT LIMITED (1)
* 7,027,921 Surface acoustic wave sensor 11 2002
 
NATIONAL UNIVERSITY CORPORATION SAITAMA UNIVERSITY (1)
* 7,375,454 Surface acoustic wave excitation device 9 2007
 
ROSEMOUNT INC. (1)
* 4,800,758 Pressure transducer with stress isolation for hard mounting 40 1986
 
SANDIA CORPORATION (1)
* 5,117,146 Acoustic wave device using plate modes with surface-parallel displacement 37 1991
 
SEIKO EPSON CORPORATION (1)
* 7,728,483 Lamb wave type frequency device and method thereof 8 2007
 
SILICON VALLEY SENSORS, INC. (1)
6,550,337 Isolation technique for pressure sensing structure 29 2000
 
The Charles Stark Draper Laboratory, Inc. (1)
* 7,109,633 Flexural plate wave sensor 5 2003
* Cited By Examiner