Precision specular proximity detector and article handing apparatus employing same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Jul 3, 1984
Grant Date -
N/A
app pub date -
May 10, 1982
filing date -
May 10, 1982
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Infrared radiation is focused to a line at a site at which a semiconductor wafer is expected to appear when a wafer is transferred with, i.e., loaded onto or unloaded from, a semiconductor wafer conveyor. A cylindrical lens of selected focal length is positioned to receive and focus to a line at an image plane radiation reflected by a wafer arriving at the site. An apertured stop defines an opening at the image plane to pass reflected radiation to an infrared sensor positioned on the side of the stop opposite the cylindrical lens.
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