Silica sol compositions for polishing silicon wafers

United States of America Patent

Stats

Jul 31, 1984
Grant Date
N/A
app pub date
Jun 21, 1982
filing date
Jun 21, 1982

priority date (Note)
Expired

status (Latency Note)

Importance

Loading Importance Indicators... loading....

Abstract

Semi-conductors can be polished with greater efficiency using as a polishing agent a blend of colloidal silica or silica gel, a water-soluble amine and a water-soluble quaternary ammonium salt or base.

Loading the Abstract Image... loading....

First Claim

See full text

loading....

all claims.. loading....

Family

Loading Family data... loading....

Patent Owner(s)

Patent Owner	Address
RODEL HOLDINGS INC	1105 NORTH MARKET STREET SUITE 1300 WILMINGTON DE 19899

International Classification(s)

B24B:MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR PO....

[Classification Symbol]

[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Payne, Charles C	Aurora, IL	19	491

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Patent Searching
Technology Searching
Owner and Inventor Searching
Patent Analytics
Owner Analytics
Attorney Analytics
Inventor Analytics
Technology Analytics
Mobile Searching
Tagging
Advanced Patent Analytics
Advanced Owner Analytics
Mobile Portfolio/Analytics
Detailed Attorney Information
Prosecution analytics
Pre-publication Data
Monthly PAIR Information and Watches
Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
Follows in all categories (Watch)	10 (maximum)	50 (maximum)	500 (maximum)	Unlimited
Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

FREE	$9.95/mo		$39.95/mo	$99.95/mo

PAIR Watch Weekly Update		$2.75/mo/patent		$2.65/mo/patent
PAIR Watch Daily Update		$5.75/mo/patent		$5.55/mo/patent
Upgrade Now	Upgrade Now		Upgrade Now	Upgrade Now

Patent Searching
Technology Searching
Owner and Inventor Searching
Patent Analytics
Owner Analytics
Attorney Analytics
Inventor Analytics
Technology Analytics
Mobile Searching
Tagging
Advanced Patent Analytics
Advanced Owner Analytics
Mobile Portfolio/Analytics
Detailed Attorney Information
Prosecution analytics
Pre-publication Data
Monthly PAIR Information and Watches
Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
Watches in all categories (Watch)	10 (maximum)	50 (maximum)	500 (maximum)	Unlimited
Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

FREE	$9.95/mo		$39.95/mo	$99.95/mo

PAIR Watch Weekly Update		$2.75/mo/patent		$2.65/mo/patent
PAIR Watch Daily Update		$5.75/mo/patent		$5.55/mo/patent
Upgrade Now	Upgrade Now		Upgrade Now	Upgrade Now

Patent Searching
Technology Searching
Owner and Inventor Searching
Patent Analytics
Owner Analytics
Attorney Analytics
Inventor Analytics
Technology Analytics
Mobile Searching
Tagging
Advanced Patent Analytics
Advanced Owner Analytics
Mobile Portfolio/Analytics
Detailed Attorney Information
Prosecution analytics
Pre-publication Data
Monthly PAIR Information and Watches
Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
Follows in all categories (Watch)	10 (maximum)	50 (maximum)	500 (maximum)	Unlimited
Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

Silica sol compositions for polishing silicon wafers

Number of patents in Portfolio can not be more than 2000

United States of America Patent

06390726

Stats

Importance

Abstract

First Claim

Family

Patent Owner(s)

International Classification(s)

Inventor(s)

Cited Art Landscape

Patent Citation Ranking

Forward Cite Landscape

Maintenance Fees

Full Text

Legal Events

Matter Detail

Renewals Detail

Load PAIR data

Payment Failure

Cancel Scheduled Update

Remove Watch on PAIR

Update PAIR data

PAIR load has been initiated

File History PDF

Add Patents to Portfolio

US Family Size	Non-US Coverage
Patent Longevity Expired	Forward Citations

PATENT NO	4462188
SERIAL NO	06390726
DOCKET NO

Free

Premium

Professional

Enterprise

FREE

$9.95/mo

$39.95/mo

$99.95/mo

Free

Premium

Professional

Enterprise

FREE

$9.95/mo

$39.95/mo

$99.95/mo

Please Confirm Your Upgraded Plan Purchase By Selecting Upgrade Button

Free

Premium

Professional

Enterprise

FREE

$9.95/mo

$39.95/mo

$99.95/mo

Please Confirm Your Upgraded Plan Purchase By Selecting Upgrade Button

06390726

Stats

Importance

Abstract

First Claim

Family

Patent Owner(s)

International Classification(s)

Inventor(s)

Cited Art Landscape

Patent Citation Ranking

Forward Cite Landscape

Maintenance Fees

Full Text

Legal Events

Matter Detail

Renewals Detail

Load PAIR data

Payment Failure

Cancel Scheduled Update

Remove Watch on PAIR

Update PAIR data

PAIR load has been initiated

File History PDF

Add to Portfolio(s)

Important Notes on Latency of Status data

Important Note on Priority Date data