Cryopump
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United States of America Patent
Stats
-
Aug 21, 1984
Grant Date -
N/A
app pub date -
Sep 29, 1982
filing date -
Sep 29, 1982
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The inner cryopanel of a cryopump includes a substrate having a plurality of holes such that the open areas represent 30% to 70% of the surface area of the substrate. A layer of cryosorbing material is secured to one surface of the substrate. An imperforate panel is juxtaposed to said one surface of said substrate.
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Cited Art Landscape
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