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Abstract

A differential pressure sensor (10) adapted specifically for use with vortex shedding flowmeters which can be used in small spaces, uses a bending beam (60) for providing an electrical signal proportional to differential pressures between two oppositely facing diaphragms (40A, 40B). The diaphragms deflect under differential pressure and cause the beam (60) to be bent. The diaphragms have low mass and have a support structure (43) between them, carrying spring clips (50) which load one end of the bending beam (60). The other end of the bending beam (60) is then supported so it cantilevers from its mounting or support (61, 62) and upon movement of the diaphragms under differential pressure the beam (60) will bend. The signal can be derived by using a bending element made of a piezoelectric 'bimorph' beam, which provides a voltage output as it bends, a strain gauge sensor on a beam, or an optical sensor, such as a fine fiber which deflects and provides an optical output may be used, as well as similar devices. Preferably, the sensor is a piezoelectric bimorph beam because of the direct electrical signals provided, which result from bending of the beam (60).

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First Claim