Process for inspecting and automatically sorting objects showing patterns with constant dimensional tolerances and apparatus for carrying out said process
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Oct 16, 1984
Grant Date -
N/A
app pub date -
Dec 14, 1981
filing date -
Dec 18, 1980
priority date (Note) -
Expired
status (Latency Note)
A preliminary load of PAIR data current through [] has been loaded. Any more recent PAIR data will be loaded within twenty-four hours. |
PAIR data current through []
A preliminary load of cached data will be loaded soon.
Any more recent PAIR data will be loaded within twenty-four hours.
Next PAIR Update Scheduled on [ ] |
Importance
US Family Size
|
Non-US Coverage
|
Patent Longevity
|
Forward Citations
|
Abstract
This invention relates to a process for inspecting and sorting objects showing patterns with constant dimensional tolerances as masks, integrated circuit chips, modules currently in use in the electronic industry. The process is based on the comparison of the image of a reference object I.sub.ref with the image of an object to be inspected I.sub.exa. Images I.sub.ref and I.sub.exa after being picked up and sampled, are thresheld to produce binary electronic images which are cleaned, then centered to allow the comparison of resulting electronic images I.sub.REF and I.sub.EXA to be carried out. The image processing includes the following operations: First of all constructing electronic images I.sub.REF max and I.sub.REF min respectively which are images I.sub.REF expanded and eroded by a structuring element adapted to the dimensional tolerances of the object to be inspected. Then, the images of the defects of the 'spreading' type and of the 'lack' type are constructed by respectively carrying out the following logic operations: [I.sub.REF max OR I.sub.EXA ] EXC.OR I.sub.REF max and [I.sub.REF min OR I.sub.EXA ] EXC.OR I.sub.EXA. Then, the defect images are analyzed with respect to a predetermined reject criterion. At last, final sorting step is carried out. This invention also relates to an apparatus for carrying out said process. Said apparatus can comprise a digital computer for automatizing the various steps which are indicated above.
First Claim
Family
- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
- INTERNATIONAL BUSINESS MACHINES CORPORATION
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Linger, Claude J A | Paris, FR | 2 | 104 |
Locicero, Gisele C | Evry, FR | 2 | 104 |
Cited Art Landscape
- No Cited Art to Display
Patent Citation Ranking
Forward Cite Landscape
- No Forward Cites to Display
Maintenance Fees
Fee | Large entity fee | small entity fee | micro entity fee | due date |
---|
Fee | Large entity fee | small entity fee | micro entity fee |
---|---|---|---|
Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
Full Text
Legal Events
Matter Detail
Update Public Data Dismiss Edit SaveRenewals Detail
Edit SaveNote
The template below is formatted to ensure compatibility with our system.
Provide tags with | separated like (tags1|tags2).
Maximum length is 128 characters for Customer Application No
Mandatory Fields * - 'MatterType','AppType','Country','Title','SerialNo'.
Acceptable Date Format - 'MM/DD/YYYY'.
Acceptable Filing/App Types -
- Continuation/Divisional
- Original
- Paris Convention
- PCT National
- With Priority
- EP Validation
- Provisional Conversion
- Reissue
- Provisional
- Foreign Extension
Acceptable Status -
- Pending
- Abandoned
- Unfiled
- Expired
- Granted
Acceptable Matter Types -
- Patent
- Utility Model
- Supplemental Protection Certificate
- Design
- Inventor Certificate
- Plant
- Statutory Invention Reg
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Success
E-mail has been sent successfully.
Failure
Some error occured while sending email. Please check e-mail and try again!
PAIR load has been initiated
A preliminary load of cached data will be loaded soon. Current PAIR data will be loaded within twenty four hours.
File History PDF
Thank you for your purchase! The File Wrapper for Patent Number 4477926 will be available within the next 24 hours.
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully
Important Notes on Latency of Status data
Please note there is up to 60 days of latency in this Status indicator for certain status conditions. You can obtain up-to-date Status indicator readings by ordering PAIR for the file.
An application with the status "Published" (which means it is pending) may be recently abandoned, but not yet updated to reflect its abandoned status. However, an application filed less than one year ago is unlikely to be abandoned.
A patent with the status "Granted" may be recently expired, but not yet updated to reflect its expired status. However, it is highly unlikely a patent less than 3.5 years old would be expired.
An application with the status "Abandoned" is almost always current, but there is a small chance it was recently revived and the status not yet updated.
Important Note on Priority Date data
This priority date is an estimated earliest priority date and is purely an estimation. This date should not be taken as legal conclusion. No representations are made as to the accuracy of the date listed. Please consult a legal professional before relying on this date.
We are sorry but your current selection exceeds the maximum number of portfolios (0) for this membership level. Upgrade to our Level for up to -1 portfolios!.