Vibrating quartz diaphragm pressure sensor
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United States of America Patent
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-
Oct 23, 1984
Grant Date -
N/A
app pub date -
Jun 10, 1983
filing date -
Jun 10, 1983
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A quartz crystal vibrating diaphragm pressure sensor includes a primary quartz crystal body having a diaphragm formed therein and electrodes on each side of the diaphragm for piezoelectrically exciting thickness shear mode oscillations of said diaphragm, said oscillations varying in frequency in accordance with variations in fluid pressures applied to the surfaces of said diaphragm. A second identical or substantially identical diaphragm similarly excited but exposed to a constant pressure provides a reference frequency for providing precision difference frequency pressure measurement and for inherently compensating for ambient conditions affecting both diaphragms.
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