Apparatus for conveying semiconductor substrates
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United States of America Patent
Stats
-
Nov 20, 1984
Grant Date -
N/A
app pub date -
May 4, 1982
filing date -
May 12, 1981
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An alignment apparatus for positioning a substrate in a determined position comprises three rotating rollers having outer circumferences contactable with the circumference of the substrate at three different portions thereof. A first roller and at least one of the remaining rollers are driven to rotate the substrate in a predetermined direction. A holder holds the first roller and is displaceably biased toward the remaining rollers. A rotation inhibitor comes into close contact with a flat on the substrate when the substrate comes to a predetermined rotated position in which the flat and the first roller are in opposition to each other. The rotation inhibitor is provided integrally with the holder in such a predetermined positional relation to the first roller that as a result of the close contact with the flat of the substrate, the inhibitor can inhibit the holder from being moved in the direction for contact between the first roller and the flat.
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