Radiation-stimulated deposition of aluminum

United States of America Patent

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Dec 18, 1984
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N/A
app pub date
Apr 4, 1983
filing date
Apr 4, 1983

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Expired

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Abstract

A method for depositing aluminum films on a substrate comprises exposing the substrate to vapors of an aluminum hydride-trialkylamine complex and exposing the surface to ultraviolet light in the areas where aluminum deposition is desired.

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Patent Owner(s)

Patent Owner	Address
WESTERN ELECTRIC COMPANY INCORPORATED	222 BROADWAY A CORP OF NY NEW YORK NY 10038

International Classification(s)

C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Olmer, Leonard J	Hopewell Township, Mercer County, NJ	9	1153
Shanefield, Daniel J	Princeton Township, Mercer County, NJ	7	233

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Radiation-stimulated deposition of aluminum

Number of patents in Portfolio can not be more than 2000

United States of America Patent

06482078

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PATENT NO	4489102
SERIAL NO	06482078
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06482078

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