Semiconductor device having an amorphous metal layer contact

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United States of America Patent

PATENT NO 4494136
SERIAL NO

06419589

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Abstract

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A metallization system for high temperature use comprises a layer strongly bonded to the surface of a semiconductor substrate in the form of an alloy of a metal in the amorphous state in which the metal is a transition metal, transition metal/normal metal alloy or transition metal/metalloid alloy having a crystallization temperature from the amorphous state in excess of 200.degree. C. The as-deposited amorphous films exhibit good adhesion and show at least an order of magnitude improvement in corrosion protection compared to polycrystalline coatings. Annealing treatments below the glass transition temperature have been found to further enhance this protective behavior of the amorphous films.

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Patent Owner(s)

Patent OwnerAddress
WISCONSIN ALUMNI RESEARCH FOUNDATION THE A CORP OF WISMADISON WI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Perepezko, John H Madison, WI 20 294
Wiley, John D Madison, WI 4 33

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