Apparatus and method for photolithography with phase conjugate optics
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United States of America Patent
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Jan 29, 1985
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N/A
app pub date -
May 1, 1984
filing date -
Dec 21, 1981
priority date (Note) -
Expired
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Abstract
An apparatus and method of photolithography with phase conjugate optics having a pump nonlinear medium for producing four way mixing of a beam of coherent electromagnetic radiation incident to said nonlinear medium with a spatically modulated representation of image thereon. The nonlinear medium producing by the phenomenon of four way mixing. A phase conjugated beam having a representation of the image spatically amplitude modulated thereon. The phase conjugated beam is directed toward a surface sensitive to electromagnetic radiation.
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