Etching techniques

United States of America Patent

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Feb 12, 1985
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N/A
app pub date
Jul 27, 1983
filing date
Jul 27, 1983

priority date (Note)
Expired

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Abstract

A highly selective--greater than 100 to 1--etch for silicon, tantalum, tantalum silicide and tantalum nitride is achieved by using polyatomic halogen fluorides. The selectivity is achievable without employing plasmas or wet etching.

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Patent Owner(s)

AT&T BELL LABORATORIES;BELL TELEPHONE LABORATORIES, INCORPORATED

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Inventor Name	Address	# of filed Patents	Total Citations
Cook, Joel M	Union Township, Hunterdon County, NJ	16	741
Donnelly, Vincent M	Berkeley Heights, NJ	14	910
Flamm, Daniel L	Chatham Township, Morris County, NJ	19	765
Ibbotson, Dale E	Westfield, NJ	7	506
Mucha, John A	Madison, NJ	4	186

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Etching techniques

Number of patents in Portfolio can not be more than 2000

United States of America Patent

06517754

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PATENT NO	4498953
SERIAL NO	06517754
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06517754

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