Variable capacitance pressure transducer
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United States of America Patent
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Feb 19, 1985
Grant Date -
N/A
app pub date -
Apr 28, 1983
filing date -
Apr 28, 1983
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A capacitance type pressure transducer having a removable capacitor plate formed of a ceramic substrate containing a conductive film spaced in a controlled relation opposite a tensioned metal membrane. For precluding temperature induced differential forces from adversely affecting transducer accuracy, the controlled relation between the capacitor plate and metal membrane is maintained by a plurality of flexure pins of selective deflection properties securing the assembled spacing therebetween.
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