Apparatus for etching vertical junction solar cell wafers
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United States of America Patent
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-
Feb 26, 1985
Grant Date -
N/A
app pub date -
Dec 28, 1983
filing date -
Dec 28, 1983
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus for etching semiconductor wafers which comprises a cylindrical vessel with a lid having associated cooling means, a basket assembly, rack means for holding a plurality of wafers, support means for supporting the basket assembly above the bottom of the vessel, and stirring means.
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Cited Art Landscape
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