Semiconductor printing apparatus with multiple independent temperature control
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United States of America Patent
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-
Mar 5, 1985
Grant Date -
N/A
app pub date -
Apr 6, 1982
filing date -
Apr 13, 1981
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A semiconductor printing apparatus eliminates the alignment error caused by any relative deformation between the mask and the wafer due to variations in parameters such as temperature change, and intermediate processing, for example, etching etc. The apparatus is characterized by the provision of a device for cooling or heating respectively and independently plural different sections of at least either of the mask and the wafer.
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