Diamond-like film and process for producing same
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United States of America Patent
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-
Mar 12, 1985
Issued Date -
N/A
app pub date -
Nov 3, 1983
filing date -
Oct 21, 1981
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An amorphous, carbonaceous, diamond-like film and a process for producing the same is disclosed. The film has an extremely low hydrogen content and an extremely low stress, is resistant to both acids and alkalis, and adheres tenaciously to many types of substrates including glasses, plastics, metals, and semiconductors. The process for producing this film is a hybrid process using radio frequency plasma decomposition of an alkane and a pair of spaced carbon electrodes.
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