Method of coating ceramics and quartz crucibles with material electrically transformed into a vapor phase

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United States of America Patent

PATENT NO 4505948
SERIAL NO

06614434

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Abstract

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Quartz crucibles for the melting of silicon and ceramic substrates are coated with protective materials or metals at least in part evaporated from an electrode with which an arc is struck at low voltage and current to deposit material from the electrode on the substrate in a vacuum chamber. The electrode may be heated and the substrate may be sandblasted and preheated.

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Patent Owner(s)

Patent OwnerAddress
MASCO VT INC21001 VAN BORN ROAD TAYLOR MI 48180

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Pinkhasov, Eduard Forest Hills, NY 21 377

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