Manufacture of thin film transistor

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United States of America Patent

PATENT NO 4514253
SERIAL NO

06517042

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Abstract

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A thin film transistor is disclosed which has an insulator substrate, a gate electrode, a semiconductor layer and a source/drain electrode disposed on the insulator substrate. The source/drain electrode is patterned through a combination of mask deposition technique and photo-lithography technique.

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Patent Owner(s)

Patent OwnerAddress
SHARP KABUSHIKI KAISHAOSAKA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Minezaki, Shigehiro Ikoma, JP 13 174

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