Planarization method
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United States of America Patent
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-
May 7, 1985
Grant Date -
N/A
app pub date -
Jan 2, 1981
filing date -
Jan 2, 1981
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A process for producing an extremely smooth or planarized layer of material employs a polymeric material which, when melted has a viscosity enabling it to flow into all crevices and voids on the treated surface. Subsequent heating cures the polymer to form a planarized layer.
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Cited Art Landscape
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