Testing apparatus of semiconductor wafers
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United States of America Patent
Stats
-
May 21, 1985
Grant Date -
N/A
app pub date -
Aug 2, 1982
filing date -
Aug 3, 1981
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A testing apparatus of semiconductor wafers includes a base plate and a probe card including probe needles, wherein the probe card is detachably affixed to the base plate under air suction, which is derived from a vacuum produced in an airtightly sealed space provided between the base plate and the probe card.
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