Complex probe card for testing a semiconductor wafer
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United States of America Patent
Stats
-
Jun 11, 1985
Grant Date -
N/A
app pub date -
May 21, 1981
filing date -
May 27, 1980
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A probe card includes a printed circuit plate having an aperture at the center thereof and a ring fixed around said aperture on either side of the plate. The ring is adapted to support probe needles in radial arrays with respect to the aperture. Each of the arrays has a multilayer of probe needles which have their terminal tips aligned on a plane in parallel with the plate and their opposite terminal ends connected to the printed circuit for external connection.
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