Vaporizer crucible for vacuum vapor-deposition
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United States of America Patent
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Jul 16, 1985
Grant Date -
N/A
app pub date -
Jul 7, 1983
filing date -
Jul 29, 1982
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A vaporizer crucible for vacuum vapor-deposition apparatus, comprises a metallic body 1 having a recess 2 for accommodating vaporizing material and connected in a thermally-conductive manner to a cooling duct 7 which surrounds the recess 2 at least partially. For effectively preventing reduction in heat transfer in the event of the formation of vapor bubbles in the cooling medium at least one guide device 22 for imparting a swirling motion to the cooling medium flowing in the cooling duct 7 is provided in said duct. The guide device 22 preferably takes the form of a spiral element matching the path of the cooling duct.
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