Process for the production of silicon nitride
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United States of America Patent
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Jul 23, 1985
Grant Date -
N/A
app pub date -
Apr 12, 1984
filing date -
Apr 19, 1983
priority date (Note) -
Expired
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Abstract
A process for the production of silicon nitride by reaction of silicon dioxide, carbon and nitrogen at temperatures above about 1300.degree. C. whereby a partial pressure of nitrogen above 1 bar is maintained during the reaction.
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