Device for the projection printing of masks into a workpiece
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 10, 1985
Grant Date -
N/A
app pub date -
Jun 24, 1983
filing date -
Jul 9, 1982
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
In order to determine magnification and/or alignment in a device for the projection printing of a pattern on a mask onto a substrate an adjustment plate insertable below the projection lens is provided, said adjustment plate being provided with light-transmitting zones conjugated with recesses in the mask in respect of the projection lens in the exposure light, photometer means being arranged below said light-transmitting zones.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully