Importance

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Abstract

A capacitive pressure transducer of the deflecting diaphragm type is adapted to be coupled to a capacitance transducing circuit and includes a generally planar, electrically conductive base member support upon a first insulative substrate. A sensor member is supported upon a second insulative substrate in a generally parallel, spaced relationship from the base member and coacts with the base member to form a sensor capacitor. A reference member is generally coplanar with and in electrical isolation from the sensor member and coacts with the base member to form a reference capacitor. The sensor and reference members each have a plurality of segments interposed one with another. The sensor and reference capacitors have pressure-dependent capacitance values Cs and Cr respectively such that, for discrete pressures selected within an operative range of pressures, the output signals from the transducing circuit will be substantially linear. A method for making such a deflecting diaphragm type capacitive pressure transducer is also disclosed.

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First Claim